0.55

Conditions Body Ported Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T0806 x 1 m VF1120-01 Speed controller AS3002F-06 AS3002F-08 AN101-01 Silencer Tubing x Length T0604 x 1 m T1075 x 1 m VF3130-02 Speed controller AS3002F-06 AS4002F-10 AN110-01 Silencer T1075 x 1 m T1209 x 1 m Tubing x Length T0604 x 1 m VF5120-03 AS4002F-10 AS4002F-12 Speed

3

Analog Output Flow rate/Analog output Fluid temperature/Analog output A B B Output Output A C Voltage output 0.6 V 1 V 04/20/40 11 21 C D C Current output 2.4 mA 4 mA 1 V 1.5 V 6 mA 1.4 V 5.6 mA 1.5 V 5.9 mA 5 V Voltage output 4 mA 20 mA Current output C D The values of B vary according to the range.

/

PE 12 E Bracket Main port R T J D 1 2 3 I O M C N P: For mounting 4 locations B H G A Drawing indicates conduit terminal type.

Manifold Specifications

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 440 Series MGZR Double Power Cylinder/ Without Non-rotating Mechanism Dimensions Basic style GA GB 2 x P (Rc, NPT, G) Y Y MM depth M D1 KA D C B 2 x 4 x J MC NA NB MA MB KA C B K H S + Stroke ZZ + Stroke MGJ MGP MGQ MGG MGC (mm) MGF Stroke range Bore size (mm) H J B MM D1 K M MA MB MC NA NB P S Y ZZ D C KA GA GB MGZ 20 25 32 40 50 63

Servo Motor Controller (24 VDC)

(Circuit example) * The figure below shows the stopped state. 0V 24VDC Reset switch for stop Ry stop switch Ry Surge suppressor Power supply plug (the 1st controller) RG+ RG0V M 24V C 24V EMG BK RLS Ry Controller power supply 24V 0V Power supply plug (the 2nd controller) RG+ RG0V M 24V C 24V EMG BK RLS Ry Controller power supply 24V 0V Power supply plug (the 3rd controller) 0V M 24V C 24V

Fieldbus System

m is number of I/O Units.

VCC

Manifold C C 1 V V V C C 1 0 0 Valve Specification Sheet Fill in the symbol for stainless steel fitting. For others, mark necessary items with a circle.

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

Compact Type Dual-Rod Cylinder Series CXSJ

Vertical Mounting L L Mounting orientation m m Max. speed (mm/s) up to 200 up to 400 up to 600 up to 800 All strokes Stroke (mm) 6 10 15 Selection graph 1 2 3 4 20 25 32 Horizontal Mounting L Mounting orientation m m Refer to the caution notes below.

240

Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. (At 15 m: Reduced by up to 20%) Note 7) A reference value for correcting an error in reciprocal operation. Note 8) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw.

Digital Pressure Switch

: 0 to 50 C, Storage: -10 to 60 C (no condensation or freezing) Ambient humidity range Operation, Storage: 35 to 85%RH (no condensation) Withstand voltage 1000 VAC, 1 minute between terminals and housing Insulation resistance 50 M or more at 500 VDC between terminals and housing Temperature characteristics 2%F.S. (25 C reference) Oil resistant vinyl cabtyre cable 3 cores 3.5, 2 m 4 cores

AC Servo Motor Driver (Pulse input type/Positioning type)

Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m]. 28 - Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/LEYG25D LEY32/LEYG32 LEY32D/LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

N C D HR HN (MAX.) 4-O Bracket (Refer to the table below.)

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Y m x g m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Horizontal m Static load m M m x g x X m x g x X m x g x Z M Static moment M m x g x Y m x g x Y m x g x Z M z y Y Z m x g x X m x g x Y M m x g Note) m is a mass movable by thrust.

Table of Contents

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

51

C d9 (Shaft dia.)

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(Circuit example: The figure below shows the stopped state.) 24 VDC 0V Reset switch for stop Ry stop switch Surge suppressor Ry U Power supply plug (the 1st controller) LK RLS (6) Ry (3) EMG (2) M 24V Controller power supply (1) C 24V 0V (4) 24VDC 0V Power supply plug (the 2nd controller) LK RLS (6) Ry (3) EMG (2) M 24V Controller power supply (1) C 24V 0V (4) 24VDC 0V Power supply plug (

Compact Cylinder/Guide Rod Type Series CQM

Auto switch mounting surface Bore size (mm) 12 16, 20, 25 32, 40, 50 63, 80, 100 Port side Port side Port side Port side C A C A C A C A B B B B Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch model Port side A, B, C sides Port, A, B, C sides A, B, C sides Port, A, B, C sides BQ-2 BQ2-012 2 kinds of auto switch

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

83503 Flat cable connector Socket: 20 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 10 pin MIL type with strain relief Complies with MIL-C-83503 D-sub connector Complies with MIL-C-24308 JIS-X-5101 Applicable connector Internal wiring +COM, COM Weight W (g) Note 3) n1: Stations n2: Number of supply/exhaust blocks m : Weight of DIN rail W = 3.2n1 +