Table of Contents

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

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"t l: '-~ ~ o li , >-1 '" 2-95.5 .

Table of Contents

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

2/3 Port Valve

D, T S(1) S L, Z Refer to p.0-33 for Safety Instructions p.0-37 to 0-40 for common precautions.

Compact 5-Port Solenoid Valve

10 One-touch fitting 12 One-touch fitting 2 One-touch fitting, 4 One-touch fitting, 6 One-touch fitting 6 One-touch fitting, 8 One-touch fitting 10 One-touch fitting, 12 One-touch fitting IP40 IP67 IP20 IP67 IP67 D-sub communication connector: IP40 IP65 IP67 I/O unit: partially IP40 Unit: g w Wiring Terminal block box Lead wire Serial wiring T type TC type L type (0.6 m) L type (1.5 m) L

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kit: 0.32n + 0.75 S, T kit: 0.32(n2) + 1.8 F, T kit 18 stations Side 1/2 Option SV L F kitD-sub connector L T kitTerminal block box L L kitLead wire L S kitSerial transmission VQ4l00 VQ4l01 L kit 16 stations VQ4000 VV5Q41-lll Direct exhaust with silencer box SYJ S kit 18 stations Not including valve weight.

Air Pilot Operated Series NVSA

t 6 6 l n / " Eq{I .-.

Hydraulic

GA R J H MM D E e Width across flats G l 10 f CX Air release NB -0.1 -0.4 Air release SS + Q + l + Stroke C NA T B U ZZ + Q + l + Stroke K F MA S + Stroke L A RR SS + Stroke ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) l e CX J B C F GA GB NA NB P R S T CD RR SS U L f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 25 to 1400 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (accessory) K M Square embedded type pressure gauge (accessory) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (accessory) K M Square embedded

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector (M) Note) Note) Light Surge voltage suppressor Note) VF1000/VF3000 only.

7

K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102 71 50

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4 l / t \ t k d / l \ t t 4 1##I!

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L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc Dl!:;;I~ '!I!

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ConlrolNet and CANopen protoclos, with 64 l/O t\r12ll\,18 connecbr slection available (t.

Aluminum High Vacuum Angle Valve

indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9/

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Stability of suction position,

With Set Screw/With Male Thread Adapter: Vacuum Inlet Vertical ZP3E-T(32 to 50)(UM/BM)l-AL14 ZP3E-T(63 to 125)(UM/BM)l-AL16 ZP3E-T(32 to 50)(UM/BM)l-A10 ZP3E-T(63 to 125)(UM/BM)l-A16 q Male thread adapter (With 2 mounting nuts) Form/Diameter Part no.

ITV_D-E

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .