Body Size: 20, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 01 (1/8), Float Type Auto Drain: C [N.C.

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration

Body Size: 20, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 01 (1/8), Float Type Auto Drain: C [N.C.

MK

Therefore, make sure to install the arm in the direction indicated in diagram A. 4.1-9 Series MK 32, 40, 50, 63 Through hole (Basic)/MKB Both ends tapped/MKA Model MKA MKA50 MKA63 A B 32 40 M6 X 1.0 10 M8 X 1.25 14 M10 X 1.5 18 S Model A G I J Q U X T B H K L O V Yh9 Z C P D E R F 0 0.062 0 0.062 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0.15 0.15 MKB32 31.5 9 Depth 7 M10 X 1.5 93.5 71.5 Rc(PT)1/8

Magnetically Coupled

Stroke Note 1) 50, 63: L 0 0.008 8-V Effective thread length Y H A B G H B G NN (R) NA Q N F I NA F N CC0.1 NCY3B50, 63 NCY3B6 to 15 (inch) Model Symbol L K J I H G F D A B NN C MM CC N NA P NCY3B6 NCY3B10 NCY3B15 NCY3B20 NCY3B25 NCY3B32 NCY3B40 NCY3B50 NCY3B63 1.38 1.50 2.24 2.60 2.76 3.15 3.62 4.50 5.00 0.19 0.19 0.37 0.31 0.38 0.51 0.56 1.00 1.00 0.16 0.18 0.24 0.24 0.31 0.31 0.39 0.47

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

3 Port Solenoid Valve/

600 V Protection against electric shock Class II (EN60947-5-1: 2004) 20 VG342-X87 Symbols Safety limit switch Made by OMRON Symbol Pin Numbers (Built-in switch 2N.C.)

/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 1, /: /, 2nd Nominal Nozzle Size: 1 (ø0.7), 2nd Selection Supply Valve and Release Valve: K (N.C./N.C.), 2nd Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 2nd Selection Quantity: 1

/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 2, /: /, 2nd Nominal Nozzle Size: 2 (ø1.0), 2nd Selection Supply Valve and Release Valve: K (N.C./N.C.), 2nd Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 2nd Selection Quantity: 2

Compressed Air Preparation Filter

Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L * Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts No.

Stainless Steel Heat

80 2 to 40 (Relative humidity of 85% or less) Single phase, 220VAC (50Hz), 240VAC (50Hz) 225 5 Air cooled R134a Operating pressure Inlet air temperature Ambient temperature Pressure dew point Working fluid Inlet air pressure Inlet air temperature Ambient temperature Power source Power consumption Circuit breaker Note 3) Electrical specifications Operating ranges Rated conditions MPa C C V

MRQ

The amount of air requirement of rotary actuator = 0.06 x V x (P/0.1013)/t /min(ANR) V: Inner volume = cm3 P: Absolute pressure = {Operating pressure (MPa) + 0.1013} t: Operating time = s CRB1 Calculate the required air volume separately for the linear motion part and the rotary motion part.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

80 2 to 40 (Relative humidity of 85% or less) Single phase, 220VAC (50Hz), 240VAC (50Hz) 225 5 Air cooled R134a Operating pressure Inlet air temperature Ambient temperature Pressure dew point Working fluid Inlet air pressure Inlet air temperature Ambient temperature Power source Power consumption Circuit breaker Note 3) Electrical specifications Operating ranges Rated conditions MPa C C V

IDUS/IDFS

HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330 315 470 325 530 IDUS6E 315 130 605 540 Rc 3/4 325 355 515 485 325 575 285 110 AMG Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6.

/N.C.), 1st Selection Vacuum V Port: 9 (Vacuum, V Port: Ø5/16), 1st Selection Quantity: 1, /: /, 2nd Nominal Nozzle Size: 2 (ø1.0), 2nd Selection Supply Valve and Release Valve: K (N.C./N.C.), 2nd Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 2nd Selection Quantity: 1

/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 2, /: /, 2nd Nominal Nozzle Size: 2 (ø1.0), 2nd Selection Supply Valve and Release Valve: K (N.C./N.C.), 2nd Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 2nd Selection Quantity: 2

/N.C.), 1st Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 1st Selection Quantity: 2, /: /, 2nd Nominal Nozzle Size: 4 (ø1.5), 2nd Selection Supply Valve and Release Valve: R ( Self-holding Release Valve Linked/N.C.), 2nd Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 2nd Selection Quantity: 1

High Pressure Coolant Valve

Pilot Operated Solenoid Valve Specifications VO307D DZ1(-Q) DIN terminal Pilot solenoid valve Electrical entry Coil rated voltage (V) AC (50/60 Hz) DC 100 V, 200 V, Other voltage (Semi-standard) 24 V, Other voltage (Semi-standard) 15 to +10% of the rated voltage Allowable voltage fluctuation Temperature rise 50C or less (When rated voltage is applied.)

Counter/Extension Cable

COM RS Q G 1 k ( ) or Control signal input RS H A 2.2 k (Select Reset/ Hold/Bank) Power supply (24 or 12 VDC) RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-29 Series CEU CEU5 Operation Parts description External power supply Pulse input terminals Control signal input A COM COM COM B 12 VDC GND F.G. R.S.

/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 1, /: /, 2nd Nominal Nozzle Size: 3 (ø1.2), 2nd Selection Supply Valve and Release Valve: K (N.C./N.C.), 2nd Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 2nd Selection Quantity: 1