Clean Regulator

: 0.55 MPa, Fluid: Air 0.5 r Outlet pressure MPa 0.4 0.3 OUT IN 0.2 33 0.1 2 x Rc 3/4 to 1 0.0 t e y q 0 1000 2000 3000 4000 Flow rate L/min (ANR) Component parts Material No.

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

RSQ

MK(2) Rod end configuration Configuration Rounde bar type Chamfered type Roller type Lever type (Non-adjustable) (3) Application Basic style With cancel cap With lock menchanism With lock & cancel Symbol Nil K R L B C D E Bore size RS Q G Piping 12 16 20 32 40 50 12 mm 16 mm 20 mm 32 mm 40 mm 50 mm Nil F Screw-in piping Built-in One-touch fittings (2) RS H A Note 2) Bore sizes available

ZM

How to Order ZM L Nozzle diameter 05 07 10 13 15 0.5 mm 0.7 mm 1.0 mm 1.3 mm 1.5 mm Release flow rate adjusting needle CE compliant Nil Q Nil L Without lock nut CE compliant With lock nut Compatible with release valves only. Vacuum port location Made to Order Refer to pages 1004 to 1006 for details.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

[Option] How to Order Manifold VV5Q 1 1 08 C6 U1 F 10 CE compliant Series Nil CE compliant VQ1000 1 Q Note) For CE compliant models, DC-type only.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

[Option] How to Order Manifold VV5Q 1 1 08 C6 U1 F 10 CE compliant Series Nil CE compliant VQ1000 1 Q Note) For CE compliant models, DC-type only.

KP

T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !

KV2

Series KV2 How to Order KV2 L 07 35 S Series Sealant Body Style With Sealant (as applicable) S Male Connector Straight Union Cartridge Straight H Thread Size 1/16 NPT 33 Male 45 Elbow Cartridge 45 Elbow K 1/8 NPT 34 Male 90 Elbow Plug-In 90 Elbow Union 90 Elbow Cartridge 90 Elbow 1/4 NPT 35 L 3/8 NPT 36 1/2 NPT 37 3/4 NPT 38 Male Branch Tee Union Tee T Union 00 Male Branch Y Union Y Plug-In

VDW

Size 2 (VDW2) 2 6 One-touch fitting 2.3 24 VAC 3.2 12 VDC K L M N P Q Low concentration ozone resistant (Seal material: FKM) 1.6 M5 2.3 VCH Oil-free 3.2 Aluminum G thread 1.6 VDW VDW NPT thread 1/8 2.3 With bracket (Aluminum body only) 3.2 SX10 DimensionsPage 463 (Single unit) VQ LVM 457

VP500/700 Series How to Order VP 5 1 7 5 D Y 1 Modular connection type Flow direction Series Nil Left to right 5 VP500 R Right to left 7 VP700 Bracket Pressure specification Nil Without bracket Nil Standard (0.7 MPa) With bracket*1 B K High-pressure type

VP500/700 Series RoHS How to Order VP 5 1 7 5 D 1 Y Modular connection type Flow direction Series Nil Left to right R Right to left 5 VP500 7 VP700 Bracket Pressure specication Nil Without bracket B With bracket*1 Nil Standard (0.7 MPa) K High-pressure type (1.0 MPa) *1 Brackets are supplied loose, not assembled, at time of shipment. Includes 2 mounting screws.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

3 Port Solenoid Valve Body Ported Series VQZ100/200/300 Single Unit [Option] Plug Lead Unit VQZ100 / How to Order Valve Series VQZ 1 1 5 5 M C6 1 PR CE compliant CE marked 1 VQZ100 body width 10 mm Nil Q Note) For CE compliant models, DC-type only. Type of actuation N.C.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

How to Order Valve SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series 1 2 3 SV Nil W Note) Compliant Nil Q CE marked VQZ1000 body width 10 mm VQZ2000 body width 15 mm VQZ3000 body width 18 mm SYJ Note) VQZ2000/3000 DIN terminal rubber seal only (except external pilot). For details on IP65 enclosure, refer to page 933.

VXF2

Diaphragm/Main valve material Class B Coil insulation type Piping Material With/without silencer Voltage Electrical entry Port size Symbol Port size With/without silencer Diaphragm/ Main valve material Symbol Electrical entry Voltage Piping Symbol Symbol A B 1 2 3 4 20A NBR/POM Without Grommet 25A NBR/POM A With A Direct piping type 40A 24 VDC 50A A B Direct piping type B C D E F G H J K

: K (with Operation Manual and Calibration Certificate)

Valve and Release Valve: K (N.C.

Vacuum Pump System), 1st Selection Supply Valve and Release Valve: K (N.C.

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: N (w/o Pressure Switch for Vacuum/Pressure Sensor), Leadwire: without Leadwire, Unit Options: without Option, 1st Nominal Nozzle Size: 0 (for Vacuum Pump System), 1st Selection Supply Valve and Release Valve: K (N.C.

Size: 0 (for Vacuum Pump System), 1st Selection Supply Valve and Release Valve: K (N.C.

Size: 0 (for Vacuum Pump System), 1st Selection Supply Valve and Release Valve: K (N.C.

Valve: K (N.C.