SMC Corporation of America
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Note 7) Accumulated flow rate is reset when the power supply turns OFF.

VFA3000 DXT031-30-11 DXT156-9-8 Note VFA5000 HNBR 7 Gasket 1/4: VF5000-71-1 3/8: VF5000-71-2 1/2: VF5000-71-3 8 1/4: VF3000-71-1 3/8: VF3000-71-2 Sub-plate Aluminum die-casted Round head combination screw (1 pc.) DXT031-44-1 (M4 x 39.5, With spring washer) Caution For mounting valve Tightening Torque for Mounting Valve Hexagon socket head cap screw (1 pc.)

View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-42 7 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Functions/PF2D Refer to the operation manual how to set and to operate. Output types Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected.

7 SlA 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 VlA 13 1 (Bleed port) 11 10 4 15 10 10 5-M5 X 0.8 (Piping port) 8.2 14 14 15 Bracket VM/VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2-M3 X 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 7 8.2 2.5 (Mounting holes for manifold) 2-P1.8 2-M3 X 0.5 (Pilot port) A B 11 1.5 (Mounting holes) 2-3.2 17.5

Class Symbol PAF341S 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 PAF541S PAF341S PAF541S tubing size (mm) tubing size (inch ) SMC SMC SMC 4 4 5 5 6 6 1 2 1 2 1 2 4 4 5 5 6 6 A B A B A B 1/2" x 3/8" 3/8" x 1/4" Panel mount union U P 3/4" x 5/8" Union 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC Note) Select the fitting after confirming the IN / OUT side fitting size and fitting type.

7 Note 1) 3/16", 5/16", 3/8", 1/2" are made of POM, stainless steel, brass (Electroless nickel plated).

7 to !9 Electroless nickel plated High carbon chrome bearing steel Resin Polyurethane Seal kit includes !7, !8, !9. Order the seal kit, based on each bore size.

7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !0 i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !

Pressure Control Equipment Industrial Filters CY3R6 @4 @6 @7 @8 CY3R10 @9 @6 @4 @7 @8 @5 CY3R15 to 63 @4 @9 @6 @5 @8 @7 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series CY3R. *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No. Replacement Parts/Seal Kit Kit no.

7, !8, @1. HYCB32-PS HYCB40-PS HYCB50-PS HYCB63-PS 32 40 50 63 !5 !6 !7 !8 19 @1 Cushion seal Rod seal Resin NBR (FKM can be selected.) 1 HYCB50H-PS Set of left nos. !5, !6, !7, !8, @1. Rod seal Piston seal NBR (FKM can be selected.) 1 NBR 1 HYCB63H-PS Piston seal Cylinder tube gasket NBR 1 NBR 2 (FKM can be selected.) Place the seal material symbol in .

7 18 !9 Rod seal NBR (FKM can be selected.) Set of left nos. !5, !6, !7, !9. Kit no. Contents Bore size (mm) External seal: Rod seal, O-ring (Rod side) and seal washer are made from FKM. Seal kit includes !5, !6, !7 and !9. Order the seal kit based on each bore size. Since the seal kit does not include a grease pack, order it separately.

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

Side D 2 RD+ Receive Data + 5 (SI unit side) 3 4 Solenoid on side B Output No. 1 3 5 7 9 17 29 31 3 TDTransmit Data 1 3 5 7 1 1 5 7 Bit No. RDReceive Data 4 7 Valve manifold 3 Safety Instructions Power supply connector layout PWR: M12 4-pin plug A-coded No.

Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.

(24 5 100 500 9.5 ) 590(7s 690(7s 7,AC250V G ()JIS B0202(ISO228-1) ISO1179-1(G )ISO16030(G )JIS B0202(ISO228-1) ISO11791(G ) () ISO1179-1 ISO1179-2 ISO1179-3 ISO1179-4 () ISO16030(G )()ISO16030 () 0100 1 / -10110 1 2 3F.S. 7 s 2 5F.S. 1090 2 -67No.PF-OMM0004-D (PVC ) PF3W711 PF3W721 (3 mPas(3 cP)) 1 10100 L/min 30250 L/min 7140 L/min(7 L/min 0) 20350 L/min(20 L/min 0) 7140

4.10 Communication Format and Examples of Answers from Thermo-con . 4-8 5 MODBUS communication function . 5-1 5.1 Precautions for communication . 5-1 5.2 Communication specification . 5-2 5.3 Setting and checking . 5-2 5.4 Communication sequence . 5-4 5.5 Message configuration . 5-5 5.6 Function codes . 5-7 5.7 LRC . 5-7 5.8 Explanation of function codes . 5-8 5.9 Negative response . 5-12

Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P18 3-1. Replacement of rod seal 3-2. Checks 3-3. Consumable parts 4. Made to order product (XC85, X446) P21 4-1. Food Machinery Grease Specification 4-2. PTFE Grease Specification 5. Basic Circuit for Cylinder Operation P22 6. Troubleshooting P23 7.