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Rush speed into cushion is as follows: M + m 2 = 1.4a Ek = 2 Ek: Kinetic energy (J) M: Weight for the driven object (kg) m: Weight for movable part of cylinder (kg) : Maximum speed (m/s) a: Average speed (m/s) = 1.4 x 300 = 420 mm/s. Note) Set a so that rush speed into cushion should not exceed 0.75 m/s.

300 (mm/s) or Less 10 1 20 16 0.1 10 6 0.01 20 40 60 80 100 0 Overhang L (mm) 8-2-12 11 Compact Slide Series MXH Selection Graph (4) to (12) (Horizontal mounting) Maximum Speed 100 mm/s or Less Maximum Speed 500 mm/s or Less Maximum Speed 300 mm/s or Less Graph (10) Load Eccentricity 50 mm Graph (7) Load Eccentricity 50 mm Graph (4) Load Eccentricity 50 mm 10 1 10 1 0.1 MX Weight m (kg) Weight

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

90) Operating time (s/90) Operating time (s/90) MHY2-16D MHW2-25D MHF 3.0 20 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 2.5 MHL 15 2.0 MHR 10 1.5 MHK 1.0 5 0.5 MHS 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 MHC Operating time (s/90) Operating time (s/90) MHY2-20D MHW2-32D MHT 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 MHY MHY 40 4 30 MHW MHW 3

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Do not drop, bump or apply excessive impacts (300m/s or more for reed switches and 1000m/s or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

kit 16 stations 16 NKE Corp.: Uni-wire H System 1 to 8 stations SUNX Corp.: S-LINK System (16 output points) 8 SUNX Corp.: S-LINK System (8 output points) 1 to 4 stations 8 stations D side DeviceNet, CompoBus/D (OMRON Corp.) 16 16 stations 1 to 8 stations OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) 8 8 stations 1 to 4 stations Mitsubishi

D 1 F Long stroke model MHKL 2 20 S 1 F F9NL D Number of auto switch Number of fingers S 2 pcs. 1 pc. 2 2 finger Bore size 12 16 20 25 12mm 16mm 20mm 25mm Actuation D S C Double acting Single acting (Normally open) Single acting (Normally closed) Finger material 1 Carbon steel Stainless steel Dust cover material F S Chloroprene rubber Fluoro rubber Silicon rubber Auto switch Without auto

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

W : W max. value is from at Va=300mm/s 1 = W/W max. =10/70 =0.143 L3 C (2) Static moment Examine Mr. (Mp,My values do not apply to this example.)

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Sine Rodless Cylinder Series REA High Speed Cylinder Up To 12in/s Smooth Deceleration Construction Designed To Transport Delicate Workpieces Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products Glass products Allows rapid transport o Major improvement of throughput Rapid transport has been achieved with a maximum drive speed of 300mm/s (12in/s).

50 to 1000mm/s Base cylinder Rubber bumper Cushion Guides Built-in shock absorber (2 pcs.)