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) Seal conduit entry Terminal block box wiring diagram 874 A Air Catch Sensor Series ISA2 Dimensions: Individual Wiring Type With bracket L1 L2 3 L2 5 38 3 38 LED level meter LED level meter ZSE30 ISE30 Lead wire connector EXH port EXH port End plate L End plate L End plate R ZSE40 ISE40 3 0 3 0 3 0 ZSE10 ISE10 92 21 92 21 P P P T T T U U U E E E L L L S S S L L L 5.5 81 5.5 81 6 9 6 9 6

Please contact SMC for further details. 6 CONTENTS Easy to Operate Integrated Controller Slider Type EQFSH Series p. 8 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 9 How to Order p. 17 Specifications p. 18 Construction p. 20 Dimensions p. 21 Rod Type EQYH Series p. 36 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 37 How to Order p. 43 Specifications

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

21 2x G1/4 -77No.PF-OMO0004CN-E PFMB7201S-F02L 2x G1/4 21 -78No.PF-OMO0004CN-E PFMB7201-C8 2x -79No.PF-OMO0004CN-E PFM7B7201-C8L 2x -80No.PF-OMO0004CN-E PFMB7201S-C8 2x -81No.PF-OMO0004CN-E PFMB7201S-C8L 2x -82No.PF-OMO0004CN-E (ZS-33-F) A 54 +0.5 0 74 +0.5 0 13.2 mm 1, -83No.PF-OMO0004CN-E (ZS-33-M) (ZS-33-MS) (ZS-33-D) -84No.PF-OMO0004CN-E Revision history A B C [2016 9 ] D

History History Version Preface Contents Chap.1 Chap.2 Chap.3 Chap.4 1.0 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Record of Changes Version Contents Date 1.0 First edition Feb/19/21 INR-244-831 i Preface Preface Thank you very much for purchasing SMC Thermo-con.

2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

1/8 (Finger closing port) 45 DAuto Switch Mounting Groove Dimensions 2032.9 20 20 51 O S 11 11 Rc 1/8 (Finger operating port) 25 13 MHW2-32D1 Right angle finger type 5 6.45 5.5 44 21 14 20 7 18 4-M6 x 1 (Thread for mounting attachment) 34 27 51 12-10-21 21 Series MHW2 Dimensions MHW2-40D Flat finger type (Standard) 30 2-M8 x 1.25 thread depth 15 (Mounting hole) 27.5 104.5 4-M8 x 1.25 thread

OUT () Blue [Black] Refer to pages 20 and 21 for magnetic field resistant auto switches. 17 Series CLK1 Auto Switch Specifications Auto Switch Internal Circuits Lead wire colors inside [ ] are those prior to conformity with IEC standards.

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.

Consult SMC concerning water resistance, flexibility of lead wires, and usage at welding sites, etc. 21 Series CUJ Specific Product Precautions 1 Be sure to read before handling. Refer to pages 15 through 21 for safety instructions, actuator precautions and auto switch precautions. Mounting Selection Caution Strictly observe the limiting range of lateral load on a piston rod.

47.2 52.2 18.5 Applicable tubing O.D. d AS221FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS221FE-02-10SK 20 21 43.2 33.9 10 18.5 42 AS321FE-03-06SK 16 39.3 27.8 6 12.8 57 AS321FE-03-08SK 18.5 41 29.5 8 15.2 60 R 3/8 19 14 46.5 51.5 52.8 57.8 20.9 23 AS321FE-03-10SK 21 43.3 31.9 10 18.5 62 AS321FE-03-12SK 22 44.3 32.8 12 20.9 64 AS421FE-04-10SK 21 47.9 33.6 10 18.5 103 R 1/2 24 17 51.5 56.5 59.7

port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting attachment) 30 45 21 12-10-20 20 180 Angular Style Air Gripper Rack & Pinion Style Series MHW2 MHW2-32D Flat finger type (Standard) 24 MHZ MHF 2-M6 x 1 thread depth 10 (Mounting hole) 21 MHL 61.5 83.5 MHR 4-M6 x 1 thread depth 12 (Mounting thread) 2-M6 x 1 thread depth 12 47 Bottom through

Weight (g) D1 D2 L1 L2 A M Urethane M5 X 0.8 M6 X 1.0 20.5 21 22 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 8 9 4 10.4 12 21 16 2.5 3.5 3.5 23.5 23.5 12 14 1 8 M5 X 0.8 M6 X 1.0 22 21 21.5 23 26 26.5 29.5 31 34 35 38 36.5 39.5 2.5 3 3.5 5.0 3.5 5.0 8 12 24 12.8 14 23 17 6 25.5 26.5

M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25 Rc(PT)1/8 241 104 55 20 40.5 70 73 162 25 58 14 26 M8 X 1.25 Rc(PT)1/4 MY1 Without rear plate Bracket mounting stroke Long stroke Bracket mounting stroke stroke range (mm) Bore (mm) Bore (mm) Bore (mm) Y R Z

MHK MHS 32.9 20 20 51 O S 11 11 Rc(PT)1/8 (Finger opening port) MHC2 25 13 MHT2 5 MHW2-32D1 MHY2 6.45 5.5 Right angle finger MHW2 MRHQ Auto switch 44 21 14 MHW2-32D.SMHW2, #3 MHW2-32D1.SMHW2, #6 20 18 7 27 4-M6 X 1 (Thread for mounting attachment) 34 2.8-21 51 Series MHW2 Dimensions MHW2-40D Flat finger (Standard) 30 2-M8 X 1.25 Depth 15 (Mounting thread) 27.5 104.5 4-M8 X 1.25 Depth 16

41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 10.5 14 SMC SMC 1/8, 1/4-2 port 3, 5 port 21 21 21 21 1/8, 1/4-2 port 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 3-11-15 16 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6

CLK1P 63 8 50 8 40 7 Brown [White] Blue [Black] Operating range: The range within which the switch turns ON. 21

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.