XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

Multistage Ejector Series ZL112/212 1

pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

boro 6rze9 omy, Proof pressure 06, 10 85psi {5.98k9f/cm'} o 15-40 101psi {7.1kgflcm'?}

NCY2 series

boro 6rze9 omy, Proof pressure 06, 10 85psi {5.98k9f/cm'} o 15-40 101psi {7.1kgflcm'?}

CEx-OMQ0010

DC12~24V 1. 2. 3. 4. 2 CE2 ()CEU2 CEU1 CEU5 0.1mm 2-1 CE2+CEU2 CEU2 CEU2 8 CE2+CEU1CEU5 3 CEU1CEU5 9 2-2 2-2-1 C E 2 B 40 100 Z N R 40 40mm ( mm ) H 50 50mm () 63 63mm 80 80mm J 100 100mm K (mm) 2 S 1 40 25850 25700 n n 50 25800 25650 63 25800 25650 80 25750 25600 100 25750 25600 (mm) 40 1200 950 50 1150 900 63 1150 900 80 1100 900 100 1100 850 10 2-2-2 CEU2 NPN

3

35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67

Series AP3100

Specifications AP3600 AP3625 AP3650 AP3657 Operating Parameters Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Select compatible materials of construction for the gas Vacuum to 3000 psig (20.7 MPa) 4000 psig (27.6 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra

Air Cylinder NCM Series Stainless Steel Cylinders

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

Pneumatic Transfer System Series MF

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.

Digital pressure switch for energy-saving control ejector

Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -51NO.ZL3-OM00701-A Error No.

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

S070

In the manifold specification sheet, specify the position where the block assembly is mounted. 13.1 3.4 Mounting hole Intermediate block assembly 2 (A) 2 (A) Clip 5 11.5 Gasket 4-11-14 Series S070 Exploded View of Separable Base Base mounted/SS073A-C Exploded View of Separable Base u i w r t q e !0 y !

Parallel Type Air Gripper Series MHZ

acting 6 Standard MHZA2-6 Single acting (normally open) Single acting (normally closed) Double acting With dust cover MHZAJ2-6 Single acting (normally open) Single acting (normally closed) 6 Double acting Single acting (normally open) Single acting (normally closed) 6 Double acting Standard MHZ2 10, 16 20, 25 Single acting (normally open) Single acting (normally closed) Double acting 32, 40

Angle Seat Valve /

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10 L (Hexagon socket head cap screw) 2 x M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2 x M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61+ST 71 81 91 101 111 Part no.

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: Rc1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 11 Stations, A B Port Size: Rc1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 12 Stations, A B Port Size: Rc1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: Rc1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 3 Stations, A B Port Size: Rc1/8