Series AS-FM/AS-M/ASD-FM

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32UNF) R NPT N Needle Valve/Flow Rate Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Upstream pressure 0.5MPa Upstream pressure 0.5MPa

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

42

115.5 (Plug lead type) 25 Thread type 12.5 73 Manifold Port size Nil Rc F G N NPT T NPTF 02 1/4 03 3/8 1 Plug-in type 5 Plug lead type 26.4 1(P) VVQ4000-P--02: 1/4 VVQ4000-P--03: 3/8 4(A) 2(B) 1(P') 5(R1) 3(R2) Plug-in type Plug lead type Circuit diagram Individual EXH spacer VVQ4000 R 1 02 163 (Plug-in type) Thread type 115.5 (Plug lead type) 25 Manifold Port size Nil Rc F G N NPT T NPTF

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 64.6 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7240-L01 02 M plug connector (M): SYJ7240-M01 02 DIN terminal (D): SYJ7240-D01 02 M8 connector (W0): SYJ7240-W001 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 83.5 57.5 [64.5] 72.2 42.1 M8 x 1 62 57.1 (

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP This is used when changing piping location.

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread:

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Lever Style), Port Size: C10 (Body Ported ø10 One-touch Fitting), Thread

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread:

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: N11 (3/8" One touch Fitting), Thread: T (NPTF), Option: F2 (Side Bracket)

Actuation: 4 (3-Position Exhaust Center), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 10 (1000mm), Manual Override: Non-locking Push Type, A,B Port Size: 02 (1/4), Thread Type: N (NPT)

Actuation: 4 (3-Position Exhaust Center), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port Size: C8 (ø8 One-touch Fitting, Metric)

Actuation: 4 (3-Position Exhaust Center), Electrical Entry: TT (Terminal Type), Lead Wire Length: 20 (2000mm), Manual Override: Non-locking Push Type, A,B Port Size: N11 (ø3/8" One-touch Fitting, Inch)

Actuation: 4 (3-Position Exhaust Center), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 100 (10000mm, Semi-standard), Manual Override: E (Push-turn Locking Lever Type), A,B Port Size: 02 (1/4), Thread Type: N (NPT)