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Exhaust center: SQ A31 Pressure center: SQ B31 5 (R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZL3-OM00801-A /ZL3ZL6 / 1)1 1.5 *3) 2) 3 3)1 1 () 3 - No.ZL3-OM00801-A () -() 4 No.ZL3-OM00801-A 1.

B L1,L2,L3: A L,N: PE A PE IDF60-20-T IDF70-20-T IDF80-20-T IDF90-20-T M3.5 M4.0 8.5mm 9.5mm IDF60-30-T, IDF70-30-T,IDF80-30-T, IDF90-30-T M3.5 8.5mm [3.2.5 ] IDF60/70/80/90 Series 12-3 IDX-OM-W093 T 12.5 IDF60/70-20-T A B AC 200/200,220V 50/60Hz CM OLR FM MC MC2 PRS PRS2 ILS THR C01 C11 TB CN GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/

IDX-OM-U021-B / Series IDF100F-30-, IDF125F-30IDF150F-30URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ 2017 SMC CORPORATION All Rights Reserved.

8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2- / 1 1.5 *3) *3) 1 1 () 3- IR3000 (1) 0.2%F.S (IR3000:F.S.=0.2MPa,IR3010:F.S.=0.4MPa,IR3020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa IR3000 IR3010 IR3020 [MPa] MAX. 1.0 [MPa] () 0.1 [MPa] 0.010.2 0.010.4 0.010.8 0.2% 0.5% 11.5l /min(ANR) [1.0MPa ] -560 Rc1/4,3/8,1/2 Rc1/8 [2 ] 0.64 (1

Pi n assi gn of bus adapt or si de connect or I t em Pi n assi gn I t em Socket assi gn SLD SLD 4 4 3 D B D B CCLi nk I N CCLi nk O U T 3 2 5 D G D G D A 1 2 D A N . C.

8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM (

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VP4_50-OMU0001 / 1 1.5 *3) *3)1 1 () 3 VP4_50-OMU0001 VP4*50, VP4*70, VVP4*0 Series 5 / () () () () 0.1 2 3 VP4350 C-R ( )C-R 3 ( DC 5% AC 15% ) (SSRTRIAC )AC 1) 3 (C-R ) OFF 2)() ZNR 1V 4 VP450-OMU0001 VP4*50, VP4*70, VVP4*0 Series 5 / ( ) (1) ()COMCOM (2) () Sol.1: Sol.2: 1.NPN Sol

.· Y200T-A applicable model: AC20□-B.· Y300T-A applicable models: AC25□-B, AC30□-B.· Y400T-A applicable model: AC40□-B.· Y500T-A applicable model: AC40□-06-B.· Y600T-A applicable models: AC50□-B, AC55□-B, AC60□-B.

a) Use a water hammer relief valve, etc. to slow the valve's closing speed. b) Absorb impact pressure by using an accumulator, or elastic piping material such as rubber hose. c) Make the length of piping as short as possible. 8. Design so that the flow of liquid always fills the detection passage.

Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere A B 4 Max. A: Max. pressure value when a workpiece is adsorbed. ON = A A B 4 Min. B: Min. pressure value when a workpiece is not adsorbed. OFF = B + 16-2-21 8 Series ZSE40/ISE40 Calibration Procedures Auto Preset (In the case of confirming the supply pressure) 1. Auto preset mode 2. Preparation for auto preset 3.

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Model C [dm3/(sbar)] C [dm3/(sbar)] Av x 10-6 m2 Cv converted Cv converted b Cv b Cv N.O. N.C. 0.12 0.03 0.35 0.03 0.72 1 M5 1/8 (6A) 0.04 0.13 0.96 VDW200 0.52 0.04 1 0.31 0.08 0.45 0.09 1.9 1.6 0.52 0.16 0.52 0.16 3.8 2 1.8 1/8 (6A) 1/4 (8A) VDW300 0.13 0.38 1.0 3.1 0.28 0.52 0.30 0.50 0.12 6.7 3 1.5 0.44 0.49 0.46 11 4 17-2-75 16 Series VDW200/300 Construction VDW250 VDW350 i o !0 i !

How to Order With bracket (standard) Air suction filter In-line type with One-touch fitting 100 04 B ZFC IN/OUT applicable tube O.D.

VDW 2 0 1 B 1 Series Lead wire length OUT (2) 1 2 3 10 20, 200 30, 300 300mm 600mm Nil L1 Note) Note) Type L1 is optional. (1) IN 2 port valve Voltage Type Note 1) Maximum operating pressure differential MPa (psi) 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size mm B C1 C2 20, 200 10, 30 300 Model Pressure port 2 Note 1) Pressure port 1 1 0.4 (58) 0.9 (130.5) VDW10 1.6 0.2

51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03 3 position pressure center 1.2 1 8 VFRA4511-04 1 2 67 (3.7) [PA, B: 30.6 (1.7)] ( ): in case of normal position.

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

4-dN through I-dO countelbore Widlh across llals: K B + Stroke With cancel cap/RSlODtl-:f f C ' Dimensions ol lhe model wilh a cancel cap are the same as those shown in the above drawings. s u ' Dirnensons lof lhe matimum energy absoption Fixed mounting l'reishtS9fieS RSQ ' D mere ons ohff than lhose sfswr in lli lab e beNalhe same 6lhedawinss below mm With locking mechanism M o d e l B N