4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O,@ Non plug-in type t0 Subplate ass'y t sproza'-33-o Subplate Assy (see note below) Plug-in lype sPFo27.-36 Subplate Assy (see note below) \,lon Ptug-in type l{ote) Manifold;0=side ports; 1=botlom port6. Subplate:1=side ports; 2=bottom ports (1/4" only).

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

How To Order Connector Ass y Number vJ1_g-2o--4A-@ ( 1 10VAC: VJ10-36-3A-') ---fvJ10-20-4AL type I a..l wira len.rrh.-i Lead wire length .

Multistage Ejector (N)ZL Series

) P 2-5.4 Mounting hole 13.5 50 117 Manual override Vacuum pressure switch Exhaust with silencer Release valve P V 20 V RESETSET Supply valve 4.5 166 19 Circuit diagram Release flow rate adjustment needle Pressure supply port One-touch fitting Vacuum port One-touch fitting 500 (L: 2900) 2-5.4 Mounting hole Manual override + + Label MULTISTAGE EJECTOR 66.5 35.7 59.5 30 4.5 166 216 8.5 17 36

Electro-Pneumatic Valve NVEP/NVEF Series

Max. 1% 26-36 (1A F.S.) Max. 1% 13'18.5 (1A F.S.) lor VoltaEe Fluct. l\,lax. +10% (1A F.S.) Max. + l% against DU22-26V (14 F.S.) Currer Stability forTmp. Fluct. l\,lax. +1% @ 79'F (25'C) {1A F.S.) Max. +2% @ 79'F (25'C) (1A F.S.) vEA 250 vEA 251 vEA 252 Cperating Temp.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Blue A 40 5 1 UNIT 12 to 24VDC Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimension 3 x 7.2(=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2mm.

Antistatic One-touch Fittings Series KA

13.4 13.4 18 40 26 Uni thread 1 8 1 4 KAU08-U01 KAU08-U02 50.5 52 46.5 46 27 25 15.2 8 15.2 KAU08-U03 17 18.5 17.7 17.7 3 8 51.5 45.5 28 1 4 3 8 KAU10-U02 KAU10-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 28.4 28.4 1 2 KAU10-U04 59 51 51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 55 61 12 20.9 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Guide Table Series MGF

1570 3926 3141 7853 OUT 2356 100 36 6835 6151 5468 4784 4101 1367 3417 2734 6835 IN 2050 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (kg) Standard stroke (mm) Bore size (mm) Model 100 75 30 50 MGF 40 3.8 3.2 2.1 2.6 40 MGF 63 7.1 6.1 4.3 5.1 63 MGF100 11.0 9.6 7.0 8.2 100 2 Series MGF Clean Room Series 50 Z73 MGF 40 10 Stroke Number of auto switches Bore size

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

2 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW11 VDW21 22 20 Lead wire l approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC-16 XMC-25 XMC-40 XMC-50 XMC-63 XMC-80 40 50 65 70 88 90 26 28 36

Multistage Ejector Series ZL

vacuum adapter ZL112-GN P V 61 2-5.4 Mounting hole Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch ZL112-E P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56 8.5 30 Section A with digital vacuum pressure switch 4.5 166 175 36

LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Page 36 Page 51 13

Modular Style Regulator with Built-in Pressure Gauge Series ARG

fitting dimension K J IN OUT L H P U K C S O H L to Plate thickness ARG20 to 40: Max. 3.5 Accessory specifications Standard specifications Panel mount Bracket mount A Model Port size B C D E F G H J K L M N P Q R S T ARG20 ARG30 ARG40 40 114 26.5 57 45 47 38 52.5 39.5 19.5 6 48 65 10.4 5.4 60 2.3 35 1/8, 1/4 53 138.5 31 59 58 59 50 65 50.5 25 7 59 75 10.5 6.5 70 2.3 45 1/4, 3/8 70 150.5 36

CV/MVGQ

A1 L1 MM U1 A E1 R1 C J G5-S Polished round 12 50, 63 Y-05C 3 x 18l 16 + 0.3 + 0.1 27 28 60 M18 x 1.5 15 55.5 27 12 38 I-04 I-05 I-08 I-10 40 50, 63 80 100 + 0.070 0 12 0.1 0.3 16 69 22 24 55 M14 x 1.5 15.5 20 CV Polished round 18 80 Y-08C 4 x 25l + 0.070 0 12 0.1 0.3 16 74 27 28 60 M18 x 1.5 15.5 20 28 + 0.3 + 0.1 37 36 71 M22 x 1.5 19 76.5 28 18 55 + 0.070 0 18 0.1 0.3 28 91 37 36 71 M22

Programless Controller Series LECP1

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 36 Series LECP1 Dimensions 38 36.2 85 4.5 for body mounting 18.1 1.2 4.5 110 101 86 4.5 for body mounting CN4 I/O connector CN3 encoder connector CN2 motor connector CN1 power supply connector 37 Programless Controller Series LECP1 Wiring Example 1 Model Selection Power Supply

Digital Pressure Switch

OUT1 ON : Green OUT1 OFF: Red -30No.PS-OMU0009-D [F 2] Setting of OUT2 Page 36 Same setting as [F 1] OUT1.

Digital Pressure Switch

When only switch output needs to be affected, select the delay time setting (page 27, 33 and 36). -37No.PS-OMU0006-D [F 4] Auto-preset function This function will automatically calculate and set the optimum pressure based on the actual operating condition, when hysteresis mode has been selected. Press the or button in function selection mode to display [F 4].

Digital Pressure Switch

Installation 14 Piping 16 Wiring 18 Outline of Settings [Measurement mode] 20 Pressure Setting 21 3 Step Setting Mode 22 Simple Setting Mode 24 Function Selection Mode 26 Function selection mode 26 Default setting 26 F 0 Units selection function 28 F 1 Setting of OUT1 29 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36

Fieldbus system Digital unit

System Outline 9 Assembly 10 Mounting and Installation 12 Installation 12 Wiring 14 Digital input unit Model Indication and How to Order 17 Names and Functions of Product 17 Mounting and Installation 20 Wiring 20 LED Display 25 Specification 28 Specifications 28 Dimensions 31 Digital output unit Model Indication and How to Order 34 Names and Functions of Product 34 Mounting and Installation 36

Rotary Table

Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -36- Kinetic energy Table 13 shows the allowable kinetic energy of the rotary table. The end angle speed is obtained by: Table 13.