High Vacuum Slit Valve Do not hurt the body seat during installation. Compression of the O-ring of the mating side of the body shall be 0.7 to 0.9mm.
Do not connect multiple NFC readers / writers to a PC. Connection details using the I/O Configurator for NFC and wireless unit To use a wireless system, it is necessary to "pair" a Wireless Base and Remote. Configure this using the I/O Configurator (NFC version).
Non-locking push type Unrestricted 150/50 m/s2 Make sure that dust and/or other foreign materials do not enter the valve from the unused port (e.g. exhaust port).
/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63 80, 100 RQ Double rod CQ2W 7-6-25 MU Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 D7-6-42 Spring extend CQ2 -X Non-rotating Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12,
GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D
(mm) a b Note 2) Effective area (mm2) Note 1) D Weight (g) M2 M1 L Model Applicable tube a 3.2 4 6 8 10 12 4 6 8 10 12 16 KQG2H23-04 KQG2H04-06 KQG2H06-08 KQG2H08-10 KQG2H10-12 KQG2H12-16 3.4 5.6 13.1 26.1 41.5 58.3 12.6 13.6 16.1 17 18.6 20.8 6.5 11.6 16.3 26 33.3 54.7 12 12.6 13.6 16.1 17 18.6 9 12 14 17 19 24.6 25.6 27.2 30.7 34.1 36.6 40.4 D M2 M1 L Note 1) D is maximum diameter.
MGPM, MGPL, MGPA Common Dimensions (mm) P Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL Nil TN TF 32 40 50 63 59.5 66 72 77 37.5 44 44 49 14 14 18 18 10 10 12 12 12 12 16 16 48 54 64 78 12 15 15 15.5 9 12 12 13.5 112 120 148 162 M6 M6 M8 M10 24 27 32 39 24 27 32 39 34 40 46 58 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 20 20 22 22 M8 x 1.25 M8 x 1.25 M10
DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12
Load mass m [kg] Load mass m [kg] 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] 12 MGPK Series L L m m Plate Material Aluminum Alloy /MGPKM Vertical Mounting Operating pressure: 0.5 MPa or more Operating pressure: 0.4 MPa MGPKAM12 to 50 50 mm stroke or less, V = 200 mm/s or less Over 50 mm stroke, V
16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9 T 16 13 79 12
MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120
Name Material Number VVQ2000-80A-1 VVQ2000-80A-2 VVQ2000-80A-3 VVQ2000-80A-4 Gasket Packing Clamp screw Clip 12 12 12 12 Note) A set of parts containing 12 pcs.each are enclosed. NBR NBR Carbon steel Stainless steel !0 !1 !2 !3
(10 x 2) 0.07 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 0.06 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 0.05 63 (45 x 2) 80 (56 x 2) 0.04 100 (71 x 2) 80 (56 x 2) 63 (45 x 2) 100 50 (40 x 2) 40 (32 x 2) 32 (25 x 2) Load mass [kg] 25 (20 x 2) 20 (16 x 2) 10 16 (12 x 2) 12 (10 x 2) 1 0 50 100 150 200 250 300 350 Maximum speed [mm/sec] 5 Compact Guide Cylinder JMGP Series Bore Size 12 (10 x 2), 16 (12 x
V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay, PLC 24 V Grommet A93V
VDC 6 VDC 5 VDC 3 VDC There are only 24 VDC and 12 VDC types for type U.
0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5 (4) 4.5 5 9 10 11 15 2 (4.5) Bore size (mm) 1.5 (1) 3.5 (1) 3 (0.5) 5.5 (3) Long Stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5 (2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5 1 1.5 7.5 4.5 (2) Bore size (mm) 10 (7.5) 12 (9.5) 14.5 (12)
Warning If any error occurs, do not start operating the product.
n (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 80 90 85 10 D-M9V D-M9WV 80 + 30 (n4) 2 10 + 30 (n2) 2 90 + 30 (n4) 2 85 + 30 (n4) 2 n (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 120 20 115 D-M9AL 115 + 40 (n2) 2 120 + 40 (n2) 2 (n = 2, 4, 6, 8 )
18 20.5 26.5 9 9.5 13 14 12.5 16 1 0.5 6 8 10.5 16.5 7 6 11.5 13.5 16.5 22.5 11 10.5 16 18 20.5 26.5 5 5.5 9 10 8.5 12 5 (2.5) 9 9.5 13 14 12.5 16 4.5 (2) 10 (7.5) 12 (9.5) 14.5 (12) 20.5 (18) Note 1) ( ): Denotes the values of D-A93.
Warning If any error occurs, do not start operating the product.