Piping: 21 (Body Ported), Stations: 3 Stations

Piping: 21 (Body Ported), Stations: 2 Stations

Piping: 21 (Body Ported), Stations: 8 Stations

Piping: 21 (Body Ported), Stations: 12 Stations

Set Flow: 10 (1~10l/min), Thread: Rc(PT), Port Size: 06 (3/4), Terminal Box: 2 [Terminal Box (Contact 2b), Neon Lamp: 1 [Neon Lamp (for 110VAC Red)]

Set Flow: 10 (1~10l/min), Thread: N (NPT), Port Size: 04 (1/2), Terminal Box: 2 [Terminal Box (Contact 2b), Neon Lamp: 1 [Neon Lamp (for 110VAC Red)]

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 04 (1/2), Terminal Box: 2 [Terminal Box (Contact 2b), Neon Lamp: 1 [Neon Lamp (for 110VAC Red)]

Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 40mm

Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 10mm

Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 50mm

Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 20mm

Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 40mm

Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 20mm

Type: Common SUP/Individual EXH, Stations: 01, Bracket: -, Thread: -

Type: Common SUP/Individual EXH, Stations: 02, Bracket: -, Thread: -

Type: Common SUP/Individual EXH, Stations: 06, Bracket: -, Thread: -

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure

Clean Series: 21 [Relief Type (Copper, Fluorine and Silicon-free + Low Particle Generation)], Magnet: Built-in, Mounting: Basic Style, Cushion: Rubber Bumper, Bore Size: 20mm, Stroke: 150mm, Port Thread: Female Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -