Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 12 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2 The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation
Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 650 Valve for Water and Chemical Base Fluids VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31
Adapter with restrictor Rc1/4 ZS-31-X175 1 pc. Adapter with restrictor Rc1/8 ZS-31-X188 1 pc. Assembly-type connector PCA-1557743 1 pc. Port size Symbol Port size Model PSE570 PSE573 PSE574 PSE575 PSE576 PSE577 01 R1/8 (with M5 female thread) 02 R1/4 (with M5 female thread) For pressure switch precautions and specic product precautions, refer to the Operation Manual on the SMC website.
Size: 1/2, Model Combination: AW+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -
Size: 3/8, Model Combination: AF+AR, Port Size: 3/8, Size 31, Accessory: None, All Sizes, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -
Size: 3/8, Model Combination: AF+AR+AL, Port Size: 3/8, Size 31, Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: Upward Handle
Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -
Size: 1/2, Model Combination: AF+AR, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -