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Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 13 (for 13 Stations; Longer

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: D (DIN Rail), DIN Rail Length: 13 Stations (for 13 Stations; Longer Rail than Total Length of Specified Valve Stations), Option 2: R (External Pilot)

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

port 6 x M4 x 0.7 thread depth 8 3 10-0.05 0 (A, B, C common view) 4-0.03 0 4-0.03 0 Open: 28, Closed: 16 18.5 18.5 2 x M4 x 0.7 thread depth 8 (Thread for mounting attachment) 7 7 5.5 5.5 With Auto Switch: MDHR2-20R 11221122MDHR2-20E port location 3 x M4 x 0.7 thread depth 8 B P.C.D.36 (Mounting thread) 57 54 60 120 120 A 45 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 13 25 25 Finger closing port

attachment) S J O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY (mm) H Q A J R B K S C L T D M E N F P G Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29 11.4 5.2 16.4 27 10 23 16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13

12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

0.251 0.25 1.12 0.38 0.624 0.312 5/16-24 0.50 0.62 1/8 NPTF 0.09 125 (1 1/4") 0.88 0.41 1.62 3/4-16 0.251 0.25 1.06 0.50 0.749 0.38 1.32 0.75 0.437 7/16-20 0.78 1/8 NPTF 0.09 150 (1 1/2") 0.88 0.63 1.50 3/4-16 1.25 0.25 1.56 0.749 0.38 0.437 7/16-20 0.75 0.91 1/8 NPTF 0.09 200 (2") 1.19 0.56 1.91 1 1/4-12 0.38 1.75 0.75 0.375 0.50 2.06 0.88 1.374 0.625 1/2-20 1.03 1/4 NPTF 0.12 6-14-12 13

MY1B10 13 Seal belt MY10-16AStroke 1 14 !6 !7 !8 !9 Dust seal band MY10-16BStroke 1 13 and 14 are not included in the seal kit. Order them as required with by individual part numbers. Scraper 2 Piston seal 2 MY1B10-PS MY1B10-PS Tube gasket 2 O-ring 4 Seal kit includes !6, !7, !8 and !9. Seal kit includes a grease pack (10 g). When !3 and !

Note MY1H10 No. 13 Seal belt MY10-16AStroke 1 14 !6 !7 !8 !9 Dust seal band MY10-16BStroke 1 13 and 14 are not included in the seal kit. Order them as required with by individual part numbers. Scraper 2 Piston seal 2 MY1B10PS MY1B10-PS Tube gasket 2 O-ring 4 Seal kit includes !6, !7, !8 and !9. Seal kit includes a grease pack (10 g). When !3 and !

Seal Kit List (12, 13, 18 and 20 are not included in the seal kit. Order them as required with by individual part numbers.) Description Qty.

Type Sensor Unit) p. 5 Flow Rate Characteristics (Pressure Loss) p. 6 Internal Circuits and Wiring Examples p. 7 Parts Description p. 8 Fluid Passage Structure p. 8 Dimensions p. 9 3-Color Display Digital Flow Monitor LFE0 Series How to Order p. 10 Specifications (Remote Type Monitor Unit) p. 11 Internal Circuits and Wiring Examples p. 12 Parts Description (Remote Type Monitor Unit) p. 13

2 13 !4 @2 @3 @4 Hexagon socket head set screw Chromium molybdenum steel Sharp end section: 90 Set of left nos. @2, @3, @4 CQSB16-PS Guide pin Stainless steel Nitriding MK20Z-PS O-ring NBR MK25Z-PS Round R-type retaining ring Carbon tool steel Except 12, 16 MK32Z-PS Set of left nos. !

ZS-32-A Length: 2 m (With rubber cover) Note Lead wire with connector Mist separator regulator AWM20/AWM30/AWM40 For ISE35--A (AR/AW series) Mounting thread (M3 x 7L, 2 pcs.), adapter, lock pin, O-ring are attached ZS-32-C Mounting option Micro mist separator regulator AWD20/AWD30/AWD40 For ISE35--B (ARM10/11 series) Mounting thread (M3 x 13, 2 pcs.), adapter, lock pin, O-ring are attached

When the fluid level goes below the Low level, ERR20 (Low fluid level alarm) will be triggered. 13 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for

24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13

0.6 0.7 0.8 0.9 ITV Inlet pressure (MPa) IC Construction ITVH ARJ310-01 ARJ310F-01 ITVX 6 17 3 PVQ 8 11 VY1 15 1 VBA VBAT 7 9 AP100 Material Note Component Parts 14 4 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

Please contact us for the latest version.sales@ocaire.com, 25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 5.70051 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS252337.527.517.517.520.536.552.585.5100.535.5(33)25.5(23)15.5(13)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8