HRX-OM-X084

8.4.1 Replacing Particle Filters .8-13 8.4.2 Replacing the DI filter (Option DM) .8-13 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR010-A/W-10.8-16 8.5.2 HRR010-A/W-20.8-18 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR010-A-10/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-

HRX-OM-W002

9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A/W-20-T . 9-15 9.6.4 HRR012/018/024/030-A/W-20-MT . 9-15 9.6.5 HRR012/018/024/030-A/W-20-T1 . 9-16 9.7 Required facility water flow (for water-cooled

KJ

Note) D1: Max. diameter 15-4-20 13 Inch-size One-touch Fittings Series KQ2 Branch Y: KQ2U Applicable tubing O.D.

KR

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 15.5 14 89 Series CRBU2 Dimensions: 10 Double vane type Figures below show the intermediate rotation position when A or B port is pressurized.

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

IDX-OM-W023

T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm 1.25mm 17 17 2 () () IDU Series 13-4 13 2 IDX-OM-W023 13 T 13-5 IDU8E-10-T IDU8E/11E-20-T GFCI GFCI R For Option R R For Option R R For Option R R For Option R TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR

HRX-OM-X071

9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels . 9-16 9.8.1 Locations of Hazard Labels . 9-16 9.9 Daily Check . 9-17 Chapter 10 Product Warranty . 10-1 HRR Series HRX-OM-X071

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (kg) Port size Pilot port size (Nominal size) Function Valve model C [dm3/(sbar)] 14 14 14 14 13 13 14 (13) 14 (13) 13 13 C [dm3/(sbar)] b Cv b 0.28 0.30 0.26 0.30 0.25 0.29 0.32 (0.3) 0.32 (0.3) 0.28 0.28 Cv 3.4 3.8 3.4 3.7 3.0 3.4 3.6 (3.2) 3.6 (3.2) 3.1 3.3 VFRA4111-03

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

IDX-OM-W014

T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E-10-T IDU3E/4E/6E-20/23-T AC200 / 200,220V (50,60Hz) AC100/100,110V (50/60Hz) PE N L 1 2 or AC230V (50Hz) TB 3 PE N L 1 2 TB 3 TDR MC TDR MC TDR ILS TDR

EXxx-OMN0037CN

12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10

Title not found

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

LEH_C

/LEHZ .10 2.1 LEHZ () . 10 2.1.1 . 10 2.1.2 . 11 2.1.3 . 12 2.2 LEHZJ () . 13 2.2.1 . 13 2.2.2 . 14 2.2.3 . 15 2.2.4 . 16 3./LEHF .17 3.1 . 17 3.2 . 18 3.3 . 19 4.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

13 7 stations 7 stations (+) () () (+) 14 14 J.S.T.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

S 20 20 stations A,B port size P Port NPTF M5T M5 0.8 R Port NPTF N3T One-touch fitting A, B Port M5 0.8,N3T A, B Port M5 0.8,N3T 13 13 Series SYJ3000 How To Order Preferred Option Program How To Order: Manifold (Common SUP/Individual EXH) Applicable solenoid valve: SYJ3 40SYJ3 43Type 46(5 Port / Base mounted type) SS5YJ3-46-05 --M5T Applicable blank plate ass'y: SYJ3000-21-2A Valve stations

CRBB-OM00004

It requires only two parts for mounting (see P211070-13).

Stainless Steel One-touch Fittings Series KG

M5 Nylon Urethane KGT04-M5 KGT04-01 . 15.5 M5 0.8 14 22 15.5 23 13 3.5 4.3 4.3 7 9.5 1 8 4 13 M5 0.8 14 10 10 18 10.4 6.0 6.0 16 1 4 KGT04-02 26 25 19 4.2 13 KGT06-M5 KGT06-01 15 23 17.5 14 25.5 4.3 4.3 16 11.5 7 . 1 8 10 6 10 20 12.8 1 4 KGT06-02 27 27.5 17 17 14 13.9 13.9 21 3 8 KGT06-03 29 29 35 1 8 1 4 KGT08-01 KGT08-02 24.5 28.5 28 30 12 15 23 R(PT) 8 14 18.5 26.3 15.2 18.2 12 23 3 8

Series KG Stainless Steel One-touch Fittings

M5 Nylon Urethane KGT04-M5 KGT04-01 . 15.5 M5 0.8 14 22 15.5 23 13 3.5 4.3 4.3 7 9.5 1 8 4 13 M5 0.8 14 10 10 18 10.4 6.0 6.0 16 1 4 KGT04-02 26 25 19 4.2 13 KGT06-M5 KGT06-01 15 23 17.5 14 25.5 16 4.3 4.3 11.5 7 . 1 8 10 6 10 20 12.8 1 4 KGT06-02 27 27.5 17 17 14 13.9 13.9 21 3 8 KGT06-03 29 29 35 1 8 1 4 KGT08-01 KGT08-02 24.5 28.5 28 30 12 15 23 R(PT) 8 14 15.2 18.5 26.3 18.2 12 23 3 8