Air Preparation Equipment

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

RSH/RS1H

13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.

4/5 Port Air Operated Valve SYJA3000 Series

Base Mounted 2 position single: SYJA3120-M3(-F) 2 position single: SYJA3140-M5 10 10 (28.4) (For mounting) 2 x 3.5 5 2.5 5 5 10 (22) (16.4) (10) 2 x 3.2 22 4 (For mounting) Manual override M3 x 0.5 (Pilot port) M3 x 0.5 (Pilot port) A B 11 17.5 1 (Bleed port) 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13

IR1000/2000/3000

Description Material q w e NBR, other NBR, other NBR, other Stainless steel, NBR Brass, NBR Brass, NBR NBR NBR NBR NBR NBR NBR NBR NBR Stainless steel P362020-13 P362020-5 P36202019 P362020-13 P362030-1 P362010-1 P362010-2 P362020-2 P362020-5 P36202019 P362020-2 P362030-1 Diaphragm assembly Diaphragm assembly Diaphragm (1) r P36202025 P36201020 (-1) P36202025 Valve t y u i o !0 !1 !

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

(Also confirm that the O-ring is not damaged.) 13-10-9 4 Series ZFC Precautions Be sure to read before handling. Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series. Selection Handling of One-touch Fittings 1.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 6MM MXJ/MXS CLEAN-ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, C5, 6MM MXJ/MXS CLEAN-ROOM, 0.46191 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 6MM MXJ/MXS CLEAN-ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, C5, 6MM MXJ/MXS CLEAN-ROOM, 0.73144 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS65.95.65.65.617.623.6????3.6(1.1)3.6(1.1)3.6(1.1)15.6(13.1)21.6(19.1)????4.5

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 6MM MXJ/MXS CLEAN-ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, C5, 6MM MXJ/MXS CLEAN-ROOM, 0.46412 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS65.95.65.65.617.623.6????3.6(1.1)3.6(1.1)3.6(1.1)15.6(13.1)21.6(19.1)????4.5

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 6MM MXJ/MXS CLEAN-ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, C5, 6MM MXJ/MXS CLEAN-ROOM, 0.60345 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS65.95.65.65.617.623.6????3.6(1.1)3.6(1.1)3.6(1.1)15.6(13.1)21.6(19.1)????4.5

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 6MM MXJ/MXS CLEAN-ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, C5, 6MM MXJ/MXS CLEAN-ROOM, 0.49604 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS65.95.65.65.617.623.6????3.6(1.1)3.6(1.1)3.6(1.1)15.6(13.1)21.6(19.1)????4.5

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting

Compact Hydraulic Cylinder

Bore size (mm) NT-02 NT-04 NT-04 NT-05 NT-05 NT-08 NT-10 B C d D H 12.5 21 21 26 26 31 39 5 8 8 11 11 13 16 15 25.4 25.4 31.2 31.2 37 47.3 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 32 40 50 63 80 100 13 22 22 27 27 32 41 256 Auto Switch Mounting CHQB/CHQWB Series Refer to pages 431 to 490 for detailed specifications.

Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M8 x 1.25 40 41 28 43 20.5 32 13 ZPT50HB-A14 -B10 50 52 36 54 24 35.5 65.5 16.5 M10 x 1.5 ZPT50HB-B 8 ZU M8 x 1.25 50 52 36 54 24 35.5 16.5 -B10 M10 x 1.5 ZL ZY ZPT HB-A16 (Male thread) ZPT HB-B (Female thread) 63 80 63 80 ZF M16 x 1.5 ZP (Rc, NPT, NPTF) 8 1 Hexagon width across flats 22 6 6 Hexagon width across flats 24 SP 25 G Width across flats 37 45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7

Clean Regulator/Fluororesin Type

Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

(Port location: Side ported type only) A port B port 25 42 65 13 Series MSUA These drawings indicate the condition when the B port is pressurized.

MLGC

8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.