Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

PSE530/200

ZSP AWG24-26 (0.14 to 0.2 mm2) AWG24-26 (0.14 to 0.2 mm2) AWG20-22 (0.3 to 0.5 mm2) AWG20-22 (0.3 to 0.5 mm2) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 ISA2 1.4 to 2.0 PSE521 1.0 to 1.4 IS PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. ZSM PF2 Brown Black Blue N.C. 1 2 3 4 IF Data F.G.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

NCM-A

, 5, 6 Front nose mount (B) 12 32 32 40 Rear pivot mount (C) 40 Double end mount (E) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch. 2 Stainless Steel Body Cylinder Series NCM-A Dimensions ZB + STROKE A K W 0.50 2-ZD NE ZC MM E N KK UNF-2A N B -0.003 0.000 PILOT YC WA WB D ACROSS FLATS Y NN MOUNTING NUT Bore MM KK A B D E K N 075 (3/4") 0.250

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

4 r e !0 !1 q i !2 o !3 y Component Parts No.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

AMD

Description Material AMD150 AMD250 AMD350 AMD550 AMD650 AMD850 Glass fiber, Others Element assembly AMD-EL150 AMD-EL450 AMD-EL250 AMD-EL350 AMD-EL550 AMD-EL650 AMD-EL850 r Element assembly: With gasket and O-ring AMD800 to 1000 HA AT ID Component Parts AMG Model AMD800/900/1000 SGP-E, SS400 SGP-E, SS400 AMD801/901 Note No.

AMF

Description Material AMF250 AMF350 AMF550 AMF650 AMF850 AMF150 Glass fiber, Others Element assembly AMF-EL250 AMF-EL350 AMF-EL450 AMF-EL550 AMF-EL650 AMF-EL850 AMF-EL150 r Element assembly: With gasket and O-ring AMF800 to 1000 HA AT ID Component Parts AMG Model AMF800/900/1000 SGP-E: SS400 SGP-E: SS400 AMF801/901 Note No.

REC

0 1 1 Carbon tooling steel Nickel plated Aluminum alloy Hard anodized Cylinder tube Retaining ring e !1 2 1 Urethane Aluminum alloy Chromated Piston Bumper r !2 1 1 Resin Hard chromate plated Stainless steel Piston rod Magnet t !3 1 1 Carbon steel Zinc chromated Hexagon socket head screw Bushing Sintered oil-impregnated beaning y !

REC

8 1 1 Cylinder tube Aluminum alloy Piston seal NBR Hard anodized e !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Environment

0 i o e r t q u !1 !2 !3 !

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Suction Guard (Produced upon receipt of order) FHG Series

Differential pressure indicator w O-ring order no. e O-ring order no. Port size q Seal order no. r Seal order no. t Seal order no.

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

I/O Configurator (NFC version)

Unit No. : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) for IO mapping position. -52No.EX-OMV0017-B (e).

I/O Configurator (NFC version)

Unit No. : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) for IO mapping position. -52No.EX-OMV0017-A (e).

HRX-OM-W002

Power supply connector Cable Qty. x size 3cores14AWG 3cores2.0mm2 *including ground N E(Earth) L Fig 3-3 Cable connection 5. Insert the power supply connector to the power supply connector socket. 6.