exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

Adsorption Plate

Adsorption force (Theoretical fixing force) W = P x S x K (0.15) x 0.1 W : Adsorption force (N) S : Adsorption surface area (cm2) P : Vacuum pressure (kPa) K : Aperture ratio 0.15 (15%) Do not apply a pressure or load of 0.1 MPa or more to the adsorption surface. Doing so may cause a reduction in flatness, damage, or impact marks.

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: EAN (Negative Common, PNP; EtherNet/IPâ„¢; 32 Outputs; M12 Connector), Wiring Type: S (All Single Wiring), Valve Stations: 20 (20 Stations, All Single Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: N (NPT), Option: P (Trim Plate)

Guide Table Series MGF ø40, ø63, ø100 1

Operating pressure: P (MPa) 3. Weight of total loads: Wo (kg) Wo = (Load weight: WA) + (Jig weight: WB) 4.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

CJP

With Auto Switch Number of auto switches Action Air cylinder with auto switch S 2 1 Mounting Bore Size * 5 stroke: S type only With auto switch 6 10 15 6mm 10mm 15mm Symbol Mounting Standard B F L D T Basic Flange Foot Clevis Trunnion Applicable Auto Switches Length of lead wire (m) 0.5 () Load voltage Wiring (Output) Auto switch model No.

VXR21/22/23

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)