Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

3 H Clean Series q 11 Vacuum type q Accuracy w Size e Motor type 16 25 32 40 Nil Basic type H High precision type Symbol Type Applicable size Compatible controller/ driver 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) V V V V r Lead [mm] A Servo motor (24 VDC) V V LECA6 Symbol 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 A 10 12 16 20 B 5 6 8

Compact End Lock Cylinder Series CBQ2

Q End lock mechanism dimensions (mm) B + Stroke L J E Bore size (mm) HN (Max.)

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KZ (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)