Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 10 (1000mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 10 (1000mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 10 (1000mm)

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: -

ISA3-IOLink.eng

DOWN button 1 3 3 1 2 DO (OUT2) 2 DO (OUT2) White Hysteresis EH2 [5.0] kPa [1.00] s Atmospheric vent port OUT port Bracket EdH2 3 DC (-) 3 DC (-) Blue Response time 4 4 [1.00] s EdL2 4 C/Q (OUT1) 4 C/Q (OUT1) Black Display colour [1SoG] Green when ON, Orange when OFF (Linked to OUT1) CoL Element Description F 6 Display value compensation Sub screen FSCd [0.0] Compensated value: 0.0 [Std]

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 1/8 8 N3 N7 N9 6 4 Top M5 x 0.8 10-SYJ300 Body ported Base mounted 10-SYJ500 Top 1/8 1/8 10-SYJ700 Top 1/4 M5 x 0.8 10-SYJ300 Side 1/8 Bottom 10-SYJ500 1/8 Side 1/8 Bottom 10-SYJ700 1/4 Side 1/4 Series 10-SYJ300 Series 10-SYJ500 Series 10-SYJ700 658 Series 10-SYJ300 Rubber seal 3 Port / Pilot operated solenoid valve Air cylinder Rotary actuator Air gripper Directional control valve

Cylinder with Lock

2 (Different surfaces, same surface) 1 10 D-M9mAV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 10 D-A9m n 10 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 10 D-A9mV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces) 35 2 (Same surface) 100 Double Acting, Single Rod Double Acting, Double Rod n (Different surfaces) 35 + 30

Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

HRX-OM-X037

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.8 1.8 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water 1, DI water (pure water) 9 CH2 : Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 10 1 8 21.5 1 8 Heating capacity3 kW 1.5 1 4.0 1 Temperature stability

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

T

Polyurethane Coil Tubing: Series 10-TCU For details, refer to Pneumatic Clean Series catalog. Specifications 10-TCU 10-TCU 10-TCU 10-TCU 0425B-1 0425B-2 0425B-3 0604B-1 0604B-2 0604B-3 0805B-1 10-TCU 10-TCU 10-TCU Model Tubing O.D. (mm) No. of cores 2 cores 3 cores 1 core 2 cores 3 cores 1 core 1 core 4 6 4 8 5 Tubing I.D.

HRX-OM-S004

HRX-OM-S004 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Sine Cylinder Series REC

5.5 10 22 19.5 13 10.5 11 45 12 17 26 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard. 40 M14 x 1.5 8 56.2 7 12 24 21 16 13.5 12.5 50 14 22 32 Bore (mm) N NA NN P Z ZZ S TD TT TX TY TZ 20 30 M20 x 1.5 192 202 146 8 1/8 10 32 32 52 20 25 34.5 M26 x 1.5 196 206 146 9 1/8 10 40 40 60 20 32 42.5 M26 x 1.5 209 219 159 9 1/8 10 40 40 60 22 40 51 M32 x 2 236.5 247 181 10 1/

Sine Cylinder Series REC

5.5 10 22 19.5 13 10.5 11 45 12 17 26 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard. 40 M14 x 1.5 8 56.2 7 12 24 21 16 13.5 12.5 50 14 22 32 Bore (mm) N NA NN P Z ZZ S TD TT TX TY TZ 20 30 M20 x 1.5 192 202 146 8 1/8 10 32 32 52 20 25 34.5 M26 x 1.5 196 206 146 9 1/8 10 40 40 60 20 32 42.5 M26 x 1.5 209 219 159 9 1/8 10 40 40 60 22 40 51 M32 x 2 236.5 247 181 10 1/

HRX-OM-Y098

HRX-OM-Y098 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.