Programless controller Step motor (servo 24 VDC)

moving to position No. 11 Forward direction (2) Reverse direction (3) Start position End position Operating direction speed acceleration Operation method (1) No. 10 No. 11 Reverse 9 7 Positioning (2) No. 11 Reverse 9 7 Positioning (3) No. 11 No. 10 Forward 5 3 Positioning I/O timing chart when the electric actuator is operated by PLC.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

Cylinder with Lock

8 4 1 6 3 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 6 4 10 8 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 8.5 7.5 12.5 11.5 6 5 3 1.5 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 12 10 16 14 9.5 7.5 6 4.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 13.5 12.5 17.5 16.5 11 10 8 6.5 10.5 9.5 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18 Note) Adjust the auto switch after confirming the

Air Cylinder

3 10.5 10.5 0 0 1 1 0 0 9.5 8.5 5.5 4.5 3 2 5 4 2.5 1.5 6 5 3.5 2.5 11 10 0 0 1.5 0.5 0 0 12.5 11.5 8.5 7.5 6 5 3 2.5 5.5 4.5 9 8 6.5 5.5 14 13 2.5 1.5 4.5 3.5 3 2 16.5 13.5 12.5 9.5 10 7 7.5 4 9.5 6.5 13 10 10.5 7.5 18 15 6.5 3.5 8.5 5.5 7 4 100 18 16 14 12 11.5 9.5 9 6.5 11 9 14.5 12.5 12 10 19.5 17.5 8 6 10 8 8.5 6.5 Note) Adjust the auto switch after confirming the operating conditions

CNG

300 301 to 800 Bore size (mm) 20 25 32 40 P K KA M MM S NA PG PH PL LC LD LH LS LT LX LZ X Y W XA XB 5 6 3 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 4 6 25 117 (125) 3 50 62 15 7 10 3 12 5.5 8 3.5 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 4 6 28 127 (135) 3 57 70 15 7 10 3 12 5.5 10 3.5 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 4 6.6 28 128 (136) 3 60 74 16 8 10 3 12 6 14 4 M14 x 1.5 44 1/8 28

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

CNG

300 301 to 800 Bore size (mm) 20 25 32 40 P K KA M MM S NA PG PH PL LC LD LH LS LT LX LZ X Y W XA XB 5 6 3 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 4 6 25 117 (125) 3 50 62 15 7 10 3 12 5.5 8 3.5 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 4 6 28 127 (135) 3 57 70 15 7 10 3 12 5.5 10 3.5 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 4 6.6 28 128 (136) 3 60 74 16 8 10 3 12 6 14 4 M14 x 1.5 44 1/8 28

Valve Single Unit

single 2 position double 3 position Internal pilot Operating pressure range (MPa) Ambient and fluid temperature (C) Max. operating frequency (Hz) Manual override Pilot exhaust method Lubrication Mounting orientation Impact/Vibration resistance (m/s2)Note) 2 position single, double 3 position 10 3 5 3 5 3 Non-locking push type, Push-turn locking slotted type SV Common exhaust type for main

VEX1

R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz (Ex.)

JXCx-OMX0009

Cable colour Terminal No. 8 8m* Vcc B-1 Brown 12 GND A-1 Black 13 A 10m* A B-2 Red 7 A A-2 Black 6 B 15m* B B-3 Orange 9 C 20m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 * Produced upon receipt SD-(TX) A-4 Black 10 of order Black 3 Actuator side Controller side (14.2) (c) (b) (10.2) (5.5 (6.7 (12.7) 6 2 1 (a) (14 (18) A B 5 6 (13.5) 1 3 1 4 2 1 (30.7) (14.7) 15 16 (d) L (10) (11) 10 - [2] Actuator

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

JXCx-OMT0062

SV.00 (1) (4) (10) (9) (5) (6) ARX830007 3 (7) Label of Controller version Example) SV2.07-1.00 (8) (11) A Side No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

SYJA5000 Series

Subsonic flow when (P2+0.100)/ (P1+0.100)>0.5 Q=240S P(P1+0.100) Sonic flow when (P2+0.100)/ (P1+0.100)0.5 Q=120S (P1+0.100) Q: Air flow ratedm 3 /min(ANR) 2 ) P: Differential pressure P1P2MPa P1: Upstream pressureMPa P2: Downstream pressureMPa Correction for different air temperatures Multiply the flow rate calculated with the about formula by a coefficient from the table below.

HRX-OM-W038

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-W038 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

300 103.5 23.4Mounting holes (Lead wire length) 47.5 18 7.2 7.2 SY 3 R3 2 4 SYJ 22 10 SMC SMC 5 1 3 Manual override Cover diameter 1.6 Cross section 0.34mm2 SX 42 36 3 VK VZ VF M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) VFR VP7 46.5 VP4 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE

HEC_W-E

-8-8 8.6.3 SETTING MODE, LEVEL 3 -8-10 9 ALARM -9-1 9.1 HOW TO IDENTIFY ALARM -9-1 9.2 ALARM INDICATION -9-2 9.3 HOW TO RESET ALARM -9-3 9.4 ALARM CODE LIST-9-3 9.5 TROUBLESHOOTING -9-5 10 APPENDIX -10-1 10.1 SIGNAL AND STYLE OF CONNECTORS -10-1 10.2 POWER SUPPLY CABLE -10-2 10.3 CALCULATION OF DEW POINT (FROM PSYCHOMETRIC CHART) -10-3 v Contents Figure List Page No.

HRX-OM-O021

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 HRS Series HRX-OM-O021 Contents 3.4 Piping . 3-17 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

IDX-OM-W022

. 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option L 9 1 Safety instructions . 9 1 9 2 Specification . 9 1 9 3 Installation of heavy duty auto drain . 9 2 9 4 Maintenance . 9 2 Chapter 10 Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification