SMC Corporation of America
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WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

Cylinder series Applicable bore size (mm) 10 16 20 25 32 40 50 63 6 BJ2-006 BJ3-1 CDJ2 BJ2-010 BJ3-1 BJ2-016 BJ3-1 CDVJ3/5, CDJ2X CDBJ2, CDLJ2 CDM2, CDBM2 CDM2X, CDM2Y CDLM2, CDVM3/5 CDG1, CDBG1 CDG1Y, MGG RHC MGC CDLG1, CDNG MLGC, REC CKG1 BM2-020 BJ3-1 BM2-032 BJ3-1 BM2-025 BJ3-1 BM2-040 BJ3-1 BMA2-063 BJ3-1 BMA2-050 BJ3-1 BMA2-020 BJ3-1 BMA2-032 BJ3-1 BMA2-025 BJ3-1 BMA2-040 BJ3-1 BMA2

XT661-2A: F = f x (1/t) = 0.8 x (1/2) = 0.4 N XT661-4A: F = f x (1/t) = 3.8 x (1/2) = 1.9 N XT661-6A: F = f x (1/t) = 5.9 x (1/2) = 2.95 N XT661-8A: F = f x (1/t) = 7.5 x (1/2) = 3.75 N XT661-10A: F = f x (1/t) = 14.4 x (1/2) = 7.2 N 9700 g 9700 x 9.8/1000 = 95.06 N XT661-10A: Temporary lifting force 11.2 N < Workpiece mass 9700 g (95.06 N) 3) Confirm the relationship temporary lifting force

A B 4 (5/32") C4 10.1 8.1 6 C6 10.3 8.3 8 (5/16") C8 12 10 1/4 N7 10.3 8.3 PFM -01/02--X693 PFM -01/02--X694 7 5 7 5 10.2 10.2 43 1 1 IN OUT A 43 (34.2) (34.2) 13 3 13 3 A 18 C 18 B C OUT B 48 20 IN 20 48 2 x 3.4 2 x 3.4 C (Width across flats) A B Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 17 17 15 G 1/4 21 940 Series PFM7/PFM5 Made to Order 2 Please contact SMC for detailed specifications

Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.

11-1-l EX180-ll SJ3000-53-2A 4 5 6 Refer to page 61.

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Communication connector Power supply connector (Plug) BF LED RUN LED Switch cover DIA LED Connect i on t o ext ernal equi pm ent Pow er suppl y w i ri ng di agram Com m uni cat i on w i ri ng 1: N C di agram 1: +24V 2: RXD /TXD _N A Pow er Suppl y M ast er PLC 2: N C 3: N C D C24V B 3: G N D 4: RXD /TXD _P 4: N C 5: N C 5 Sel ect a D C pow er suppl y w i t h adequat e capaci t y w i

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

Front flange type (1) Rear flange type (1) Integral clevis type Note 1) Bore size (mm) Order no. Kit contents Single clevis type Note 1) Double clevis type Note 3) Note 1) 20 25 CM2X20-PS Rod seal 1 pc. Front trunnion type (1) Note 2) CM2X25-PS 32 40 Rear trunnion type (1) Note 2) CM2X32-PS Grease pack (10g) 1 pc. CM2X40-PS Boss-cut basic type (1) Boss-cut flange type (1) 2.

Circuit / Operation Principles . 6 6 Chapter 7 Specification for Option A 7 1 Safety instructions. 7 1 7 2 Specification . 7 1 7 3 Air piping . 7 1 7 4 Dryer specifications . 7 1 Chapter 8 Specification for Option K 8 1 Safety instructions. 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option R 9 1 Safety instructions. 9 1 9 2 Specifications of GFCI . 9 1 9 3 Cautions for handling

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

kPa 100 kPa 100 kPa For positive pressure 0.100 to 1.000 MPa 0.1 MPa 0 1 MPa 1 0.6 4 2.4 B A C B A C Pressure Pressure Descriptions LCD Unit display Displays the current pressure, set mode, and error code.

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR

(with no condensation) Storage temperature range -10 to 60 C (with no condensation and freezing) Storage humidity range 35 to 85%RH (no condensation) Withstand voltage Between all of external terminals and the case: 500 VAC for 1 minute Between external terminal and case: 50 M (500 VDC) Insulation resistance Noise resistance 1000 Vp-p Pulse width 1 s, Rise time 1 ns 21 5 positions General