HRX-OM-M090

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-W032

B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3.

ALB900

Flange JIS B 2 3 inch Mounting orientation is upward. To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no.

EXxx-OMQ0015CN

8370: JIS B 8361: JIS B 9960-1-(1 : ) JIS B 8433*2) : : : 1. 2. 3. 1. 2. 3. 4. -2No.EX-OMQ0015CN / 1 1.5 3 3) 1 1 -3No.EX-OMQ0015CN () () () () -4No.EX-OMQ0015CN / () * UL UL1310 Class2 0V -5No.EX-OMQ0015CN * IP67 / *() () ( ) * IP67 M12(M8) ( ) () -6No.EX-OMQ0015CN CE * PLC PLC * -7No.EX-OMQ0015CN EX600 SI 1 SI3210SI U SI D SI ON/OFF PNP NPN PNP NPN

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

HRX-OM-W069

output signal 3 B contact (normally closed) By default 2.4.2 Contact output signal 4 to 6 Contact output signal 4 to 6 can be set to "signal type", "contact form".

MHK2

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves. Standard switch grooves 12-6-17

MHK2

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves. Standard switch grooves 12-6-17

ITV

0 25 50 75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

Wedge Cam Operation Provides

MHW2 Groove position of auto switch A Model MHK2-12l MHK2-16l A 10.4 12.8 B 1.8 1.6 MRHQ B Auto switch Standard switch grooves Dimensions A and B other models are same as standard switch grooves. 2.4-17

Wedge Cam Operation Gripper Series MHK2

A Groove position of auto switch B 1.8 1.6 Model MHK2-12 MHK2-16 A 10.4 12.8 B Standard switch grooves Dimensions A and B of other models are same as standard switch grooves. Contact P/A for the details on dimensions, specifications, and delivery time. 28

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

MHx-OMM0057

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 *3) *3)1 1 () 3 - 2

AMPSeries

N101 Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the

NCRAI seies

'w Double rod nd 90_ 90o 100 _100o 180 _ 1800 190_.190. W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

VXA21/22

The right side of the common port provides plug. 4.1-65 VVXA21/22 Dimensions Common SUP style Individual SUP style L: Dimensions Model Stations 2 3 4 5 6 7 8 9 10 L L1 L2 L1 L2 100 86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21m VVXA22m Model VVXA21m VVXA22m A 38 49 B 20.5 [17.5] 26.5 [22.5]