Clean Regulator

25 Flow rate L/min VY1 SRH4110-03 VBA VBAT 0.5 AP100 0.4 0.3 0.2 0.1 10 5 0 15 20 25 Flow rate L/min 859 SRH Series Construction Component parts Material No.

VCB

0.85 5 0.7 20 VCB4 3.0 4 1.4 7 0.3 33 2.1 10 0.12 50 Note 1) Refer to model selection on page 17-2-24 regarding port size and orifice size combinations.

Part Number Description: MFLD ASSY 20-STA   Product Line: V   Product Line Description: VALVE   Family Code: 355   Family Description: SS5Y7 MANIFOLD SY7000   Class Code: 2J   Part Code: 2   Reference Code:  G   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: MFLD ASSY 20-STA (SY)   Product Line: V   Product Line Description: VALVE   Family Code: 355   Family Description: SS5Y7 MANIFOLD SY7000   Class Code: PJ   Part Code: 2   Reference Code:  G   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: MFLD ASSY 20-STA   Product Line: V   Product Line Description: VALVE   Family Code: 355   Family Description: SS5Y7 MANIFOLD SY7000   Class Code: 2J   Part Code: 2   Reference Code:  G   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Speed Controller with One-touch Fittings

17 22.8 12 20.5 4.3 8 19.3 22 25 12 22.1 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

AU

Refer to pages 14-21-3 and 14-214 for Safety Instructions and Common Precautions. Piping Warning Port size 1. When making drain exhaust piping, use piping with bore size 8 or larger than 8. Length should be shorter than 5 m. Do NOT pipe upwards.

AD402/600

0: 201016 14-20-49

GD40-2-01

JIS Symbol Piping Example Dimensions Thread for mounting bracket Low pressure side Pressure gauge Inlet side Outlet side High pressure side Thread depth 7 14-20-54

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT M Min. port size Weight (g) A D1 D2 L2 L1 Model Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 3.5 10.4 3.5 12 21 1 8 12.7 23.5 21.1 KSL07-34S 14.29 17 1 8 1 4 25.5 22.1 4 8.6 13.2 8.6 1 4 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26.5 30 31 37 38 25.5 1 8 25.6 29 18.5 6 15.2 21.6 14.9

VN-OMP0002

1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C.

CG1-SMV13_en

Rc 1/8 7 ~ 9 Rc 1/4 12 ~ 14 Fluid Compressed Dry Air 7 Limitations of Use Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

EXxx-OMP0004CN

MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3 ) 5 6 LED SI 2 7 SI (M330) SI 2 (BUS OUT)(1 ) 128 2LED 16 -9No.EX-OMP0004CN-I SI n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 L 9 10 11 12 13 14

AU

Refer to pages 14-21-3 and 14-214 for Safety Instructions and Common Precautions. Piping Warning Port size 1. When making drain exhaust piping, use piping with bore size 8 or larger than 8. Length should be shorter than 5 m. Do NOT pipe upwards.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

Clean Regulator/Fluororesin Type

25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

10-my1h-e

Note MY1H10 No. 13 Seal belt MY10-16AStroke 1 14 !6 !7 !8 !9 Dust seal band MY10-16BStroke 1 13 and 14 are not included in the seal kit. Order them as required with by individual part numbers. Scraper 2 Piston seal 2 MY1B10PS MY1B10-PS Tube gasket 2 O-ring 4 Seal kit includes !6, !7, !8 and !9. Seal kit includes a grease pack (10 g). When !3 and !

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For