MXU

, 10, 16 Standard stroke (mm) 5, 10, 15, 20, 25, 30 Refer to Minimum Stroke for Auto Switch Mounting on page 8-3-10.

Vacuum Gripper

-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B

Copper-free Actuators

, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20

EXxx-OMY0006CN

Table 10-1 specifications EX245-FPS1 EX245-FPS2 EX245-FPS3 (W x L x H) mm 85 x 148.5 x 136 1,100 g 1,200 g 8 128 () 64 (US1) 350 mA 300 mA (US1/US2) XD1/XD2 16 A (US1/US2) 10 A (US1/US2) 24 VDC +20%/-15% <20.4 VDC US1 >21.6 VDC < 17 VDC 6 A 24 VDC +20%/-15% <21.6 VDC : >22.8 VDC US2 / <17 VDC 4 A () 1.2 V US1 US2 4 8 US1 UT1/UT2 24 VDC +20%/-15% 2 A( UT1) 1 A (

VCC

Cleaning unit Note 2) Unit Standard unit (with gate valve) Part number (Mountable valve number) G06 G04 G02 02 04 06 08 10 12 14 16 18 20 40 U side (OUT port side) Stations Note 1) 4 5 2 3 1 Gate 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 39 40 Description/Model 2 port valve 2 port valve (Sliding type) VCC12-00 D side Valve options 2 port valve (Diaphragm type) VCC12D-00 Blanking

IDX-OM-W093

ADH-E400 1.6MPa 0.051.6MPa 3/h 0.024m 0.7MPa IDF60/70/80/90 Series 10-1 IDX-OM-W093 L 10.3 Rc1/225 30 5 IDF60 2722IDF70IDF80IDF90 22 IDF60 (IDF70/80/90) 1) 2830Nm 2) 10.4 1 1 IDF60/70/80/90 Series 10-2 IDX-OM-W093 R 11 R R (GFCI) 11.1 11.2 IDF60-20-R IDF70-20-R IDF80-20-R IDF90-20-R (A) 10 15 20 30 (mA) 30 IDF60-30-R IDF70-30-R IDF80-30 IDF90-30 (A) 10 15 20 (mA) 30

1

10 to 70C Size Applicable cylinder Nominal thread size 20 For 20 M8 x 1.25 32 For 25 M10 x 1.25 For 32 M10 x 1.25 40 For 40 M14 x 1.5 Dimensions M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E mF G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28

Electromagnetic Digital Flow Switch

aqueous solution Karman vortex IP65 3-color display 0.1 L/min 5 40 10 100 1 L/min 50 250 2 L/min PVC piping type 1 L/min 10 100 Water, Ethylene glycol aqueous solution IP65 3-color display Karman vortex 2 L/min 30 250 PF2D 0.05 L/min 0.4 4 Deionized water (pure water), Liquids which do not corrode nor erode fluoropolymer IP65 1-color display Karman vortex 0.1 L/min 1.8 20 4 40 0.5 L/min

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

JXCx-OMY0008

External Connections 20 5.1 PWR: Power supply connector 20 5.2 MOT: Motor connector, ENC: Encoder connector 20 5.3 SI: Serial I/O Connector 20 (1) Connecting the teaching box 20 (2) Connection with a PC 21 5.4 IN, OUT: EtherCAT communication connector 21 6.

RSH

20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-

PFxx-OMX0002

Input of set value Use the or buttons to set the flow value that will output 5 V (10 V) or 20 mA. The entered flow value can be in the range: 10% of the max. rated flow, to the upper display limit. Return to function selection mode. Press the S button to set.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

Digital Flow Switch (Integrated display type)

I max. 92% 8% 90% 10% PFM710 80% 20% 0.2 to 7.0 L/min 0.2 to 7.4 L/min 0 to 7.4 L/min 3.80 V 15.2 mA 70% 30% 60% 40% 92% 8% 0.5 to 25.0 L/min 0.5 to 26.3 L/min 0 to 26.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.5 to 20.0 L/min 0.5 to 21.0 L/min 0 to 21.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.0 to 50.0 L/min 1.0 to 52.5 L/min 0 to 52.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20%

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table Dimensions: MXP12 1122Z 3 Metal stopper V K Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers

7.4

stations 76 10 Rc1/8 SS0752-C Manifold pitch: 8.5 mm Page 750 C Kit: Connector Max. 20 stations 115 20 M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") Rc1/8 Note 2) 115 20 S Kit: Serial transmission (EX510) Max. 16 stations Base Mounted SS0755-CC Manifold pitch: 7.5 mm Page 750 M3 (M3 thread) V2 (2 Barb fitting) V3 (3.2 Barb fitting) V4 (5 Barb fitting) C Kit: Connector Max. 20 stations

PFxx-OMY0005

L/min 20 to 2000 L/min Instantaneous flow 10 to 1050 L/min 20 to 2100 L/min Set flow rate range 2 Flow specifications Accumulated flow 0 to 9,999,999,990 L Instantaneous flow 1 L/min 2 L/min Lowest configurable increment Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.)

DOC1023125

Speed[mm/s] Stroke Range 701 to 800 20 to 550 12 to 330 6 to 180 3 to 90 24 to 750 16 to 500 8 to 250 4 to 125 30 to 1140 20 to 760 10 to 350 5 to 175 801 to 900 24 to 610 16 to 410 8 to 200 4 to 100 30 to 930 20 to 620 10 to 280 5 to 140 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 4 to 85 30 to 780 20 to 520 10 to 250 5 to 125 1001 to 1100 30 to 660 20 to 440 10 to 220

Lubrication Equipment

-l06 to 10 ALD900-l12 to 20 D.P.