ARP PRECISION REGULATOR, 21, ARP NO SIZE RATING, 0.10824 lb

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings

Expelling contaminants outside a clean room can be done by: (11-) vacuum relief or (10- or 12-) exhaust relief. The 2*-CXSJ Copper, Fluorine, Silicone-free Series is a dual piston actuator with non-rotating accuracy ± 0.1° enhanced with lithium soap based grease making it clean room ready.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x

NCQ8

Green LED lights up Indicator light Lead wires Oilproof vinyl heavyduty cord, 0.11" (2.7mm), 20" (0.5m) 2.3x 10-4in2 (0.15mm2) x 3 cores (Brown, Black, Blue) 2.8x 10-4in2 (0.18mm2) x 2 cores (Brown, Blue) Note 1) Refer to page 50 for auto switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

Microspeed Cylinder

(0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

Series IDG

Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

Series AP3500

thread (2 each) Sides (2 each) Bottom mount 0.06 in3 (1.07 cm3) Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Adjustable range of metered flow 2) 10 to 200 slpm 10 to 350 slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Rotary Gripper Series MRHQ

10 H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping

Ionizer

Note 2) Use standard power cables for 3 m and 10 m lengths.

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22