[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Disassembly 1) After loosening the screw q, then if the housing r is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull out the screw q, then remove the gasket or . 3) On the bottom part of the terminal block e, theres a cut-off part (indication of an arrow) .

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB PA PB PW R Q GC JA JB 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 174 210 56.5 52 64 96.5 22 25 91.5 15.5 14.5 202 M12 45.5 55.5 46 56 54 62 7.5 M12 x 1.75 M14 x 2.0 25 31 M12 x 1.75 10.6 17.5 14.5 25.5 32.5 74 89 38 45 25 30 19 23 18 25 80 100 116 66 111.5 19 18

Electric Actuators

q Check the actuator label for model number.This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

Fieldbus system IO-Link Master Unit

IOL_Autostart DI_C/Q Digital input only. DO_C/Q Digital output only. -23No.EX-OMY0026 IO-Link master unit parameters (continued) No.

CY1

8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

MK

stroke (Basic) (mm) U S R K L Oh9 Q F E C B A Model MKB20 MKB25 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73/A80.

SL5200

w q w q SL5802S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 V3 V3 MPA MPA 2PW 3PW 4PW 1 1) Other range available.

MY1

Ceiling mounting x P. 42 z y q y z Wb: MGGLB25-200 (4.35kg) Refer to the pages above for actual examples of calculation for each orientation. Center of gravity Mass and center of gravity for each work piece 2 Load blocking Y 111 5 Work piece no.

CRB2/CRBU2/CRB1

Following illustrations show the intermediate rotation position when A or B port is pressurized. 3 mounting holes depicted with the marks are for tightening the actuator and not to be used for external mounting. 3-M3 x 0.5 with depth 6 3-Q (CRB2BWU10) 6-Q (CRB2BWU15, 20, 30) including A port B port A port B port Double vane type CRB2BWU15, 20, 30-D Dimensions for double vane type sizes

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Vacuum Equipment

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

%silltr

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

80

Body material: Aluminum, PPS resin, Brass, Stainless steel Body material: PPS resin (One-touch fitting type) u y t r e w q u y t r e w q OUT 2 IN 1 OUT 2 IN 1 i Component Parts Component Parts No. Description Solenoid coil Fixed armature Tube Return spring Armature assembly Seal Body No.

SMC Basic Pneumatics

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

Shock Absorbers and Rate Controls

* O . b 3 z o 1 0 0 6 o u o q ; N q * E 9 . " o . 5 " > 2 4 ' ;l l.:, . . o o o 2 4 6 8 1 0 1 2 1 4 1 6 1 8 2 0 TOTAL ENERGY ( nrbtc) (Tho!ends) Note: Minimum impact velocity tor PM nlodels it 4 itr/*c. 9k**k &"bs*rbers Non-Adjustable Hydraulic Series 49rc.

Title not found

q Check that actuator label for model number.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

CV/MVGQ

CM-T020B 10-15-34 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVM3 Construction Spring return RE A B REC CX CY MQQ M Spring extend RHC MK(2) RS Q G Built-in One-touch fitting RS H A RZQ MI W S CEP1 CE1 CE2 DIN terminal ML2B Component Parts C J G5-S Note Material No. Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !