Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 40 (Common SUP, Common EXH, Bottom Ported), Stations: 12 Stations, Port Size: M5 (M5X0.8)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 40 (Common SUP, Common EXH, Bottom Ported), Stations: 13 Stations, Port Size: M5 (M5X0.8)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 40 (Common SUP, Common EXH, Bottom Ported), Stations: 2 Stations, Port Size: M5 (M5X0.8)
Valve Mounting Direction: Solenoid on Same Side as A,B Port, Passage: Common SUP, Common EXH, Side Ported, Stations: 6 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 16 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 6 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 10 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 12 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 13 Stations, Port Size: M5X0.8, Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 2 Stations, Port Size: M5X0.8, Thread: -
High Vacuum L Type Valve Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Pilot port Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening size wrench torque XLF-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 -63 M10 8 15 -80 Body Supply air pressure of 0.4MPa (G) to the pilot port.
M5 R06 R07 N01 Port size M5 x 0.8 male thread 6 reducer type 1/4 inch reducer type Wetted parts material Pressure sensor: Silicon, O-ring: NBR Body: Stainless steel 304 Body: PBT With sensor cable (3 m) 41 g 38 g Mass Without sensor cable 7 g 3.8 g -12No.PS-OME0004-G Analog output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -101 to 101 kPa -101
Applicable auto switch Electrical entry Page Style Model Indicator D-E7lA Reed switch Grommet (In-line) Yes 5.3-24 D-E80A No 5.3-24 D-M5 Yes 5.3-41 MK/MK2 Grommet (In-line) Solid state D-M5lW 5.3-47 Yes (2 color indication) D-M5lTL RSQ/RSG 5.3-62 Yes (With timer) RSH Precautions CE1 Be sure to read before handling. Refer to p.0-44 to 0-46 for common precautions of auto switch.
A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud. M5 x 10 DIN913-45H VP4 12 2 8 VZS G 1/4 DIN/ISO228/1 M5 Drive flange face VFS VS4 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 VQ7 1.5 3 EVS VFN The solenoid valve can be attached with 2 mounting bolts.
Dimensions/20 to 100 Basic/CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Section TA/TB (mm) Bore size (mm) 20 25 32 40 50 63 TC TDH9 TE TF TG M5 x 0.8 4 0.5 5.5 +0.08 0 8 +0.08 0 M6 x 0.75 5 1 6.5 10 +0.08 0 M8 x 1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5
.: GR-S-010 (10 g) Individual -X 527 Series CXT Dimensions: 12 to 25 S + Stroke X + Stroke H 4 x LD through, counterbore B depth C 4 x MM HP Depth M Back side 4 x J depth JK HG HA T PA T (N) d d NN RW RW PW QW PB GP E W Y Z 2 x M5 x 0.8 2 x RB G G HT U (NA) (Option) A L HN (Max.)
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Y Z 2-M5 x 0.8 2-RB G G HT U (NA) (Option) A L HN (Max.)
Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -27- Kinetic energy Table shows the allowable kinetic energy of the rotary actuator.
(Only "With motor cover") (Nm) M2.5 0.3610% M3 0.6310% M4 1.510% M5 310% The fingernail of "Grommet" is inserted in the hole of "Pulley box". Grommet 43 - 7. Troubleshooting Alarms below are abstract of representative examples. For other alarms, see operation manual of controller. No.