HRS100/150

L/min 42/56 Pump capacity Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid outlet, circulating fluid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Pump drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) HEA IDH Supply side pressure range

SMC Pneumatic Clean Series

With air cushion WW WW WA WB Piping port M5 x 0.8 Cover surface MM NN GA GB F GC Piping port 3-M5 x 0.8 C D LY LB LH A LT X Y NA NB B 0 -0.3 LX S + Stroke H Z + Stroke LZ Head cover port location Axial direction (R) 2-LC Mounting hole (mm) LZ 42 42 LY 25 25 LX 33 33 LT 2.3 2.3 LH 14 14 Y 9 9 NN Z WW WA WB Bore size A M4 x 0.7 D GC B F H MM GB GA C 102.5 101.5 5.5 4.5 20 20 NB LB 21.5 23 S

Cylinder with Lock

2 Component Parts Component Parts Note No. 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 No.

ZP

M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

Refrigerated Air Dryers

Applicable air dryer Conversion piping set Conversion bypass piping set IDF-S0186 IDF-S0183 IDF6E IDF-S0203 IDF-S0202 IDF8E IDF-S0187 IDF-S0184 IDF11E IDF-S0188 IDF-S0185 IDF15E1 * Refer to page 42 for dimensions. * Refer to pages 42 and 43 for dimensions. * Refer to page 41 for dimensions. 35 Optional Accessories IDF/IDU Series Specifications/Dimensions Model Selection Options Optional Accessories

•

El F B Ie (mm) (mm) (mm) 3 o o J I v K KA M N P W MM 5 :7 M1 6 x 1.5 17 34 30.5 M36 x l .S 3/4 C. 78.5 1 42 18 15 20 34.5 106 0160 Up to 1200 53 177 144 38 56 o 15 27 27 15 M14 x 1.5 15 M30 x 1.5 30.5 112 98 Up to 1000 47 143 115 32 17 0 125 50 7t ' 43 ':5.

Vacuum Unit

The unit for the type without the unit selection function is fixed as kPa. i Option3 (For details on the Function/Application, refer to page 42.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size H Stroke L Note) Type L is not available for 10.

LEJ-OM002xx

[LECSA] LEJS40 LEJS63 LEJB40 LEJB63 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter Para.

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

Air Slide Table Series MXP

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Caution Mounting 6.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

42 52 10 14 14 16 16 16 4 5 5 12 15 15 M6 x 1 M8 x 1.25 M8 x 1.25 Up to 1000 Up to 1000 Up to 1000 39 42 52 208 228 254 436 Series MGZ Non-rotating Double Power Cylinder With End Lock on Rod Side Dimensions: With Mounting Bracket Transaxial foot style: (L) 4 x LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY LZ 40 50 63

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Type K3 ZR1-VK3M Pilot air Circuit diagram Pilot air PS PE Air operated b Air operated a PV PD Release valve Supply valve V Pilot valve for release valve Pilot valve for vacuum switching valve Manual override Dimensions not indicated are identical to type K2. 13-3-42 42 Series ZR Large Size Vacuum Module: Vacuum

Thermo-chiller/Rack Mount Type

The weight will increase by 2 kg when Option T1 (Inverter pump mounted) is selected. 12 Option M (Applicable to DI water piping) does not contain copper. 13 For Option DM (With electric conductivity control function, Applicable to DI water piping) 14 If the product is used at an altitude of 1000 m or higher, refer to For altitudes of 1000 m or higher on page 42. 15 No continuous voltage

CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9

CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16

Digital Flow Switch (Integrated display type) ( compatible)

Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (Page 42) 6. Completed [F 1] Setting of OUT1 is completed. -37No.PF-OMV0006-B Press the UP or SET button in function selection mode to display [F 1]. Press the SET button. Move on to output mode setting.

HRX-OM-X037

Table 9.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC NRTL *1 E112803(UL61010-1) *1: Except option-T2 and T3,water-cooled type.

Electric Actuator Miniature Rod Type Miniature Slide table Type

/See 7.3 Caution(2) on p.42 and Caution(12) on p.43 i < Moving force> The upper force limit for the pushing operation starting position The force is automatically adjusted corresponding to the load. Initial value: Set to [150%] /See 7.2 Caution(4) on p.42 j < Area1Area2> This is the condition that turns on the AREA output signal. The setting condition should be Area 1