Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

CM2

1 No. !2 !3 !4 !5 !6 !

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

EXxx-OMS0026CN

byte3 815 SEN3(5) Byte4 AXA 0 Hi byte 1623 (0) Byte5 Lo byte 2431 Byte6 AXA 1 Hi byte (0) Byte7 Lo byte Byte8 DXB(3) 07 Byte9 07 DXD(4) Byte10 815 Byte11 Padding 12 byte 6 byte 1(42 ) -61No.EX-OMS0026CN SI ( ) 0 0 byte 1 + 4 byte -62No.EX-OMS0026CN byte Bit No. 0 1 2 3 0 4 ON/OFF 5 6 7 / 0 1 2 Reserved 3 () 1 4 () 5 Reserved 6 7 0 0 1 1 2 2 3 3 2 4 4 5 5 6 6 7 7 0

44

H2 H1 1/8" (3.18) 0.086" (2.18) KFG2F0122-N02 25 8 1/4 26.7 17.2 5 1.5 1.1 17 d KDM 0.098" (2.5) 5/32" (4) KFG2F0325-N02 23 8 1/4 26.7 17.2 5 1.8 1.6 17 KB 1/4" (6.35) 5/32" (3.95) M L2 L1 KFG2F0704-N02 28 12 1/4 27.5 16.3 6 3.3 6 17 KR 5/16" (8) 0.236" (6) KFG2F0906-N03 32 14 3/8 29.4 17 6.6 5.3 17 19 Applicable tubing KA 3/8" (9.53) 1/4" (6.35) KFG2F1163-N03 38 17 3/8 30.5 16.1 7.6 5.6

IIIIIIIIII

F-4300-2 F-4300-5 F-4300-15 F-4300-30 F-4300-60 F-4300-100 .2 .5 .5 .5 .5 1 2 5 15 30 60 100 30 30 45 60 120 120 .1 .2 .4 .6 1.5 2.0 .2 .35 .6 1.0 2.5 3.5 3A 4A 4A 4A 4A 4A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4300BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID B85 = NYLON 1/8" ID P80 = POLYSULFONE 1

Basic Type/Direct Mount Type

Select the bore size from Lo and Fn, based on data A . 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Load Workpiece Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B10 CY3B40 500 50 300 Fn 200 40 30 20 Discrepancy absorption mechanism 100 Lo 20 30 40 50 10 Usable range 5 10 Usable range 5 1 0 1 2 3 4 5 6 Selection example

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

EXxx-OMN0027CN

0 Byte 7 Bit No. 0 1 1 1 2 1 3 1 4 1 5 1 6 1 7 1 System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No. 0 1 1 1 2 Reserved 3 1() 4 1() 5 Reserved 6 1 7 1 -73No.EX-OMN0027CN-D System diag.3 7 6 5 4 3 2 1 0 Byte 9 Bit No. 07 Reserved System diag.4 7 6 5 4 3 2 1 0 Byte 10 Bit No. 0 1 1 1 2 1 3 1 4 1SI 5 Reserved 6 Reserved 7 Reserved -74No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 19 0 1 0 0 1

Secondary Batteries

connector 4 Cable length (mm) 300 500 1000 2000 5000 Symbol W1 W2 W3 W4 W7 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

energy saving effect

A 14 17 21 25 Rated power consumption Note 5) kW (kVA) 4.2 (4.7) 5.3 (5.8) 6.6 (7.0) 8.0 (8.4) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 61 60 61 Waterproof specification IPX4 Accessories Alarm code list stickers 2 pcs.

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (