C76

2 !3 !4 !5 !6 !7 !

C76

2 !3 !4 !5 !6 !7 !

Fieldbus system Digital unit

and input) X2 2 Input 4 2 3 Input 5 4 0 V (Control and input) X2 1 24 V (Control and input) X3 2 Input 6 3 3 Input 7 4 0 V Control and input) X3 1 0 V (Output) 24 V (Output) 2 Output 0 4 3 0 V (Output) 24 V (Output) 4 Output 1 1 0 V (Output) 24 V (Output) 2 Output 2 5 3 0 V (Output) 24 V (Output) 4 Output 3 1 0 V (Output) 24 V (Output) 2 Output 4 6 3 0 V (Output) 24 V (Output) 4 Output 5

Magnetically Coupled

Bore size 15 to 63 (5/8" to 2-1/2") Specifications Bore size 6 to 63 (1/4" to 2-1/2") Construction Dimensions NCY3B Magnetic shielding plate Tube external surface is hard chromium plated 6 10 15 20 25 32 40 50 63 (mm) Bore size (inch) 1/4" 3/8" 5/8" 3/4" 1" 1-1/4" 1-1/2" 2" 2-1/2" B Standard external (B) 0.75 1.06 1.46 1.50 1.89 2.44 2.83 3.46 4.02 0.67 0.98 1.38 1.42 1.81 2.36 2.76 3.39

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

High-Precision Digital Pressure Switch

MPa Withstand pressure 1.5 MPa 100 kPa Withstand pressure 4 MPa 2 MPa 2 outputs (NPN/PNP) 2 outputs (NPN/PNP) Analog (Voltage/Current) Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/4*1, NPT1/4*1, G1/4*1, Rc1/8, URJ1/4*2, TSJ1/4*3 Copy function, Auto-shift function Copy function, Auto-shift function *1 M5 female threaded *2 Face seal fitting *3 Compression fitting 3-

Plug-in/Plug Lead: Single Unit

VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1

HRX-OM-W069

and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14

Series KP/KPQ/KPG

Color Refer to the burst pressure characteristics curve. 20 to 60C (-4 to 140F) Polyurethane Black 1in = 25.4mm Polyurethane Flat Tubing Series10-TFU Specifications Model 10-TFU 10-TFU 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores Number of cores Tubing O.D. mm Tubing I.D. mm Fluid 2 cores 4 6 4 8 5 2.5 Air Maximum operating

Series KP/KPQ/KPG

Color Refer to the burst pressure characteristics curve. 20 to 60C (-4 to 140F) Polyurethane Black 1in = 25.4mm Polyurethane Flat Tubing Series10-TFU Specifications Model 10-TFU 10-TFU 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores Number of cores Tubing O.D. mm Tubing I.D. mm Fluid 2 cores 4 6 4 8 5 2.5 Air Maximum operating

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14

KP/KPQ/KPG

3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30 8 PPS LVA40 12 SUS316 LVA50 20 Integral fitting type/Series LVC (basic type) Series LVC : Body material SUS316 only Tubing size Metric sizes Inch sizes 4 6 8 10 12 19 1/8 3/16 1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

Manually Operated Integral Fitting Type/Threaded Type Series LVH

2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" 12 1/2" LQ2 integral fitting 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.

ALF400 to 900, ALT-5/-9

( 0 3 . 6 1 ) 8 2 4 ( 5 8 . 6 1 ) 9 4 4 ( 8 6 . 7 1 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 S I 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2

Stainless Steel 316

(inch) Model KQGE03-00 KQGE07-00 KQGE09-00 KQGE11-00 KQGE13-00 5/32 KQGL03-32 KQGL03-N01S KQGL07-32 KQGL07-N01S KQGL07-N02S KQGL09-N01S KQGL09-N02S KQGL09-N03S KQGL11-N02S KQGL11-N03S KQGL13-N03S KQGL13-N04S 10-32UNF 5/32 1/4 NPT1/8 5/16 10-32UNF 3/8 1/4 NPT1/8 1/2 NPT1/4 NPT1/8 5/16 NPT1/4 NPT3/8 NPT1/4 3/8 NPT3/8 NPT3/8 1/2 NPT1/2 4 Stainless Steel 316 One-touch Fittings Applicable tubing

Filter Regulator

Assembly of 2 types of bracket and 2 set screws. Note 4) -10- 6.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

HRX-OM-R039

and wiring of power supply cable . 3-8 3.4 PIPING . 3-10 3.5 Fill of circulating fluid . 3-12 Chapter 4 Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start. 4-2 HRS Series HRX-OM-R039 Contents 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-5 4.4.1 Starting the

IP8001 Series

G1/2 3 1.0MPa 2 1/4NPT M201.5 *2 3 1/4NPT 1/2NPT Construction 4 G1/4 G1/2 0 Standard type 5 G1/4 M201.5*2 2 Output function {analog output (4-20mADC)+ alarm outputX2} 6 G1/4 1/2NPT 3 HART communication function (preparing) Accessory*1 NIL No accessory 1: If two or more accessories are required, the part numbers should be made according to alphabetical order.