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Gasket Body Low tightening torque Tight seal Stainless steel 316 Specifications Applicable tubing material FEP (3) Nylon Soft nylon (1) Polyurethane Super PFA (2) Modified PTFE (4) 3.18/2 4/2.5 6/4 4/2.5 6/4 3.18/2.18 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 6/4 Applicable tubing O.D.

Doc. no.CG1-OM0001G PRODUCT NAME STAINLESS STEEL CYLINDER MODEL / Series / Product Number C*G5*N**SR / V-* C*G5*A**SR / V-* Contents Safety Instructions P2 1. Specifications P6 1-1. Specifications 2. Installation and Handling P7 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Cushion 2-7. Control of direction 2-8. Auto switches 3.

1 ( 2 ) C t tdt + = = 2 When 0 = t , rotation angle =0, so the integration constant is C=0. t t 2 1 2 1 2 = = thus, 2 = t 30 - Auto switch type for rotary table The rotary table has a magnet mounted on its piston and an auto switch on the outside of the body to detect the piston position (table position).

(Values at the initial period) Flow Rate Characteristics/Weight C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Weight (g) Note) Port size Model C [dm 3/(sbar)] b Cv 3.5 4.2 7.9 8.9 11.9 15.1 1/8 1/4 1/4 3/8 3/8 1/2 0.26 0.22 0.21 0.16 0.21 0.21 0.8 1.0 1.8 2.2 2.7 3.6 3.6 4.2 7.2 8.9 11.8 15.3 0.26 0.23 0.27 0.20 0.20 0.22 0.9 1.0 1.8 2.1 2.7 3.7 118 114 237 229 501 484 VPA342 VPA542 VPA742

2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

+ COM (For COM specifications, specify them separately.) 1 3 5 6 VZ1120MOZ-M5 Applicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note 1) Value at manifold base mounted, single operating Note 2) Withstand voltage specification of wiring unit part is equivalent to JIS C 0704 class 1.

unit DIN rail 8-M3 3 x 7.2 ( = 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 m30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43

10 1 2466 LCD * -8No.PS-OMU0008CN-D ISE20C X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E

Applicable wire Cord external diameter: 4 to 6.5 c.f. 0.5 mm2 3 core wire (JIS C 3306 equivalent) 2.

If the difference between Set point 1 and Set point 2 is less than "6% of maximum rated flow", the maximum Set value of hysteresis is (Set point 1 Set point 2) divided by 2. 2: When Set point 1 = Set point 2, chattering may occur. -19No.PF-OMG0010-H Function selection mode Function selection mode In measurement mode, press the button, to display [F_0].

Internal C 12 31 56 83 gripping force Open/close stroke (Both sides(mm) 4 6 10 14 Note 2) Weight (g) D 60 130 250 460 SC 60 130 255 465 Note 1) Values based on pressure of 0.5 MPa, gripping point L=20 mm, at center of stroke. Note 2) Values excluding weight of auto switch. 4 - 2. Mounting of Auto Switch 2-1.

) Valve seal 1 (Maintenance part) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 3 Valve seal 2 (Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0007 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C

5 6 DC cable Signal cable Connector side IEC 60320 C-13 or equivalent 7-9 Hirose Electric Co., Ltd.: CDA-15S Holding screw M2.6 Female connector Nanaboshi Electric Mfg.

48 70 20 80 3.2 227.5 1 AMC810 135 270 273 1 2 AMC910 153 327 2 1 330 Female thread (3 equipartions of circumference) Bracket Port size R, NPT, G Cylinder speed (mm/s) Dimensions Element Drain piping type Drain guide Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5

Doc. no.VP3145-OMM0002-B PRODUCT NAME 3 Port Solenoid Valve MODEL / Series / Product Number VP315 Series Contents Safety Instructions -2, 3 Design/Selection -4, 5 Mounting -5 Piping -5, 6 Wiring -6 Lubrication -6 Air Supply -6 Operating Environment -7 Maintenance -7 Specific Product Precautions -811 Troubleshooting -12, 13 1 No.VP3145-OMM0002-B Safety Instructions These safety instructions

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

(1 % -) (2 ) (& -) & -! !" (* // 4! 5 6 / ) 7 !! -/% Proper Auto Switch Mounting Position and Its Mounting Height C M 3 3 3 & () & / * -! D-G5BAL Hs *//!! . () B A () 20 25 32 40 50 63 80 100 Auto Switch Mounting Bracket / Part No. D* -! . () 20 25 32 40 50 63 80 100 -X *+ & *+ & ,& + & *# + & *# + & *# + & *# + & *# + & D-G5BAL Individual -X : ! !

: HNBR ZDC2 O-ring: HNBR Piping port Weight 78 g 79 g 97 g 104 g 101 g 2 Series ZSE40A(F)/ISE40A 2-Color Display High Precision Digital Pressure Switch Analog Output Voltage output Current output 5 20 Analog output [mA] Analog output [V] 1 4 0.6 2.4 B A C B A C Pressure Pressure A B C Rated pressure range Range 0.00 to 14.69 psi 1.47 psi 0 14.69 psi For vacuum pressure 14.50 to 14.50 psi