Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

rubber bumper Rod end threads Male threads Thread tolerance JIS class 2 +1.0 0 Stroke length tolerance Mounting type Basic type Minimum Operating Pressure JIS symbol Unit: MPa Bore size (mm) 10 16 20 25 32 Double acting/Single rod Min. operating pressure (MPa) 0.06 0.06 0.05 0.05 0.05 Standard Strokes Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30 10, 16 5, 10, 15, 20, 25, 30

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Cold resistant cylinder (40 to 70C) w/o auto switch only Low-speed cylinder (10 to 50 mm/s) Standard Strokes Intermediate stroke (Exclusive body type) Pneumatic type Intermediate stroke (Spacer-installed type) (mm) Bore size 12, 16 20, 25 32, 40 50 to 100 Standard stroke Long stroke (Air-hydro type only) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

size (mm) Standard stroke (mm) Port size Model 11-/22-CXS6 6 Vacuum suction type Relief type 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10,

Miniature Guide Rod Cylinder Series MGJ

14.5 17 5 27.3 40.6 10 33.0 48.0 15 38.4 55.6 20 63.2 6 10 DSeries Variations -X Standard stroke (mm) Cushion Auto switch Bore size (mm) Guide rod size (mm) Series 5 10 15 20 Individual -X 6 10 5 6 Rubber bumper (Both sides) D-F8 MGJ 255 Miniature Guide Rod Cylinder 6, 10 Series MGJ How to Order 6 10 F8N Miniature Guide Rod Cylinder MGJ Miniature Guide Rod Cylinder Number of auto switches

Series VS

150.5 4 68.5 71 30 45 2 20 175.5 n= NUMBER OF STATIONS (MIN. 2,MAX.10) LENGTH FORMULA L1= 43n + 72 L2= 43n + 84 LENGTH FORMULA L1= 56n + 90 L2= 71n + 90 L1= 71n + 66 LENGTH FORMULA L2= 56n + 106 LENGTH DIMENSIONS LENGTH DIMENSIONS LENGTH DIMENSIONS SIZE 1 SIZE 2 SIZE 3 n 3 2 n n 2 3 4 5 6 7 8 9 10 7 5 4 6 9 8 10 5 4 3 2 9 8 7 6 10 L L L L1 258 202 314 482 426 538 594 650 L1 208 279 350 421

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

Series SY100 3 Port Solenoid Valve Rubber Seal

Example: 2000mm lead wire length 6 10 15 20 25 30 50 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm Connector housing Hook For AC SY114-1LO SY100-30-1A-20 For DC SY114-5LO SY100-30-4A-20 Lead wire 2.1-2 3 Port Direct Operated Rubber Seal Series SY100 Model Weight (g) (2) Vacuum application (MPa) Effective area (mm 2) (Cv) R port P port Operating pressure range (MPa) Model Actuation

Suction Filter with Case FH99 Series

90 77.8 42.9 42.9 77.8 21.5 10 21.5 2B 2 1/2B M16 x 2 Thread depth 34 M16 x 2 Thread depth 34 300 170 150 268 180 80 120 106.4 61.9 61.9 106.4 21.5 10 21.5 3B 3 1/2B M16 x 2 Thread depth 30 M16 x 2 Thread depth 30 280 145 140 273 210 80 120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991

Digital Gap Checker

For ISA3-G type, the range is up to 280, with a hysteresis of 20.

Micro-Mist Separator with Prefilter Series AMH

Bracket (Option) Optional Specifications J: With drain guide u I T: With element service indicator T Maintenance , Drain space Dimensions with mounting bracket E~ment service indicator B E F G H I J Model Port size A C D K L M N 0 P Q R S T U 5 9 5.5 35 54 70 26 4.5 1.6 24 37 AMH150 1/8, 1/4, 3/8 159 20 63 20 76 20 76 20 90 20 90 20 106 20 106 20 122 20 160 10 166 56 15 10 187 66 20 10 187

Rotary Table Series MSU

Auto switch type MDSUB1, 3 MDSUB7, 20 D-90/97, D-90A/93A D-R7, R8 Reed switch Adjustment bolt (B) adjustment range (S): 10 Adjustment bolt (A) adjustment range (S): 10 D-S99, D-T99, D-S9P D-S7, S7P, T7 Solid state switch 90 Weights Unit: g (oz) Rotation Auto switch unit + Auto switch 2 pcs.

α PneuAlpha HARDWARE MANUAL

-15% Input Impedance > 800 kOhms Input Current 0.24mA / 240V AC~ Input Voltage 100 240V AC~, +10% -15%, 50 60 Hz Operation Indication Liquid Crystal Display Isolation Circuit None None Response Time (I09 I12) 20 40 ms 20 40 ms Response Time (I01 I08) 10 20 ms 10 20 ms Description AC Input Specication Description Sink (Common) Source (+ Common) 6 PneuAlpha Hardware Specification 2 Table 2.5

Output block / Power block

Standard settings of L dimensions are with 10 or less n blocks. Ask SMC sales for the setting with over 10 blocks mounted.

Stainless Steel 316

M Weight (g) A D L D Applicable tubing (inch) 10 2.5 22 8.6 4 KQGS03-32 10-32UNF 25 18 5/32 M 2.78 12 20.9 11 4.1 KQGS03-N01S NPT1/8 A A L 2.5 22.8 13 4 KQGS07-32 10-32UNF 13 25.8 21.7 13 18.8 9.9 KQGS07-N01S 1/4 NPT1/8 4.76 Connection thread 20 20 10 KQGS07-N02S NPT1/4 H 5.56 14 30.5 26.4 17 17.2 KQGS09-N01S NPT1/8 (In case of R) 28.5 22.7 18 20.9 KQGS09-N02S 5/16 NPT1/4 D 23.3 Applicable

3 Position Cylinder Series RZQ

102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of Piston A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage

VXF

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

155

-400 KN-10-600 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8