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When the fluid level goes below the Low level, ERR20 (Low fluid level alarm) will be triggered. 13 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for

241.1 91.4 Dimensions B B B B Standard specifications Model Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13

44 98 96 6.3 5 16 18 M8 x 1.25 x 23 L and M8 x 1.25 2 x M6 x 1 (Through-hole) 2 x M5 x 0.8 thread depth 8 (Hexagon bolt) (Hexagon nut) M8 x 1.25 x 16 L (Hexagon socket head cap screw) 8 x M5 x 0.8 thread depth 7.5 (Opposite side: Same) 2 x M5 x 0.8 thread depth 4.5 Note) (Z) 30 (Opposite side: Same) 11.5 19 9 20 4 x (Rc, NPT, G) 1/8 thread depth 6.5 (Piping port), (Opposite side: Same) 13

kg] Lead 4: LEY32C 60 Lead 8: LEY32B 30 Motorless 50 Lead 8: LEY32B 22 40 20 LAT 30 Lead 16: LEY32A 11 20 10 LZ Lead 16: LEY32A 10 0 0 LC3F2 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY40m LEY40m 100 60 Lead 4: LEY40C 53 Horizontal work load [kg] 80 Vertical work load [kg] 40 Lead 4: LEY40C 60 Lead 8: LEY40B Lead 8: LEY40B 27 40 20 30 Lead 16: LEY40A 13

24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13

Vespel is a registered trademark of DuPont. 13 Delivery of sub-atmospheric pressure Single Stage Regulator for Ultra High Purity Series AP1100 For UHP gas delivery Sub-atmospheric to low positive pressure delivery Flow capacity : to 0.5 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AP11 S FV4 FV4 01 2PW

0.6 0.7 0.8 0.9 ITV Inlet pressure (MPa) IC Construction ITVH ARJ310-01 ARJ310F-01 ITVX 6 17 3 PVQ 8 11 VY1 15 1 VBA VBAT 7 9 AP100 Material Note Component Parts 14 4 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-B only, the position of the pressure gauge is above the center of the piping. 76 AR20-B to AR60-B Regulator Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

Please contact us for the latest version.sales@ocaire.com, 25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 5.70051 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS252337.527.517.517.520.536.552.585.5100.535.5(33)25.5(23)15.5(13)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

SI PWR(V)_LED DC24 V+10/-5 SI SI SI EX600-SEN3 (PNP ) 13 EX600-SEN4 (NPN ) SI SI -39No.EX-OMS0026CN No. (PNPNPN) SI PWR_LED DC24 V10% 14 (PNPNPN) SI PWR(V_LED DC24 V+10/-5 PLC -40No.EX-OMS0026CN No. SI PWR_LED DC24 V10% 15 SI PWR(V)_LED DC24 V+10/-5 PLC -41No.EX-OMS0026CN TM Web EX600 /EtherNet/IP SI No.

W-MS Vollsveien 13 C, Granfos Nringspark N-1366 Lysaker, Norway POLAND (48) 22 211 96 00 Step 2 Setting / installation of the wireless unit Troubleshooting ul. Poloneza 89, 02-826 Warszawa, Poland Red LED is ON. Non-restorable error is detected. (e.g. Hardware failure) (1) Set the number of occupied I/O points for the module and each parameter of the "remote".

(Pairing) Vollsveien 13 C, Granfos Nringspark N-1366 Lysaker, Norway Red/Green Orange LED is ON. Forced output mode. POLAND (48) 22 211 96 00 Step 2 Setting / installation of the wireless unit OFF Remote is not registered. ul. Poloneza 89, 02-826 Warszawa, Poland Troubleshooting Green LED is ON.

NOTE Refer to the product catalog or SMC website (URL http://www.smcworld.com) to obtain more detailed information about product specifications. 1 3 5 7 9 11 13 15 The direct current power supply to combine should be UL1310 Class 2 power supply when conformity to UL is necessary.

No.PS-OMT0005CN-A // PSE575/576/577 2 8 9 10 10 12 13 13 15 -1No.PS-OMT0005CN-A (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

-22No.PS-OMG0001CN-H , (2030 ) -23No.PS-OMG0001CN-H PSE300 ( ) No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 No.7 -24No.PS-OMG0001CN-H No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 -25No.PS-OMG0001CN-H No.