Series 10-MGF ø40, ø63, ø100 Guide Table

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

Compact and

The selected supply valve should at least have the C factor shown in the table below. Minimum C Factor of a Supply Valve VAC. SUP. Model C [dm3/(sbar)] ZU05 0.12 ZU07 0.23 EXH. Screw-in type u Component Parts Air Supply No. Description Material Note 1 Body PBT Caution 1. Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid.

EXxx-OMN0035CN

(3)B180(1/2) (1) (2) (3) A B C D-sub (1) (2) (3)2 0.6 Nm -14No.EX-OMN0035CN-A -15No.EX-OMN0035CN-A () 2.5 mm0.4 mm 0.081.5 mm 2(AWG1628) 56 mm EX600-ZT1 -16No.EX-OMN0035CN-A EX600-DX B M12 (5 )4 8 C M8 (3 )8 8 P PNP C1 M8 (3 )8 8 N NPN D M12 (5 )8 16 E D-sub (25 ) 16 F (32 ) 16 M12 (4 ) EX600-DXB No. 1 LED 2 () 3 4 5 () -17No.EX-OMN0035CN-A EX600-DXC No. 1 LED

PF2M7.eng

The pin of bracket engages the notched part of panel adapter section C to fix the display. The switch can be mounted on a panel with a thickness of 1 to 3.2 mm.

PF3A8xxH.eng

Press the DOWN button once to reduce the value by one digit, press and hold to continuously reduce. [ 500] 500 L/min (PF3A801H) [P_1 ]/[P_2 ] Input the set value FLoW [F 1]/[F 2] [ 50] 50 L/min (PF3A801H) [1000] 1000 L/min (PF3A802H) Caution Piping Fit the raised part of the spacer to the recessed part (groove for the raised part) of the product.

Low Maintenance Filter Series FN1

Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Two speed control ranges, M (1~50 mm/s) and C (50~150 mm/s); Push-lock and push-lock/indicator models available; Elbow/universal and in-line types; Imperial and metric variations

Two speed control ranges, M (1~50 mm/s) and C (50~150 mm/s); Push-lock and push-lock/indicator models available; Elbow/universal and in-line types; Imperial and metric variations

Two speed control ranges, M (1~50 mm/s) and C (50~150 mm/s); Push-lock and push-lock/indicator models available; Elbow/universal and in-line types; Imperial and metric variations

Two speed control ranges, M (1~50 mm/s) and C (50~150 mm/s); Push-lock and push-lock/indicator models available; Elbow/universal and in-line types; Imperial and metric variations

Two speed control ranges, M (1~50 mm/s) and C (50~150 mm/s); Push-lock and push-lock/indicator models available; Elbow/universal and in-line types; Imperial and metric variations

Two speed control ranges, M (1~50 mm/s) and C (50~150 mm/s); Push-lock and push-lock/indicator models available; Elbow/universal and in-line types; Imperial and metric variations

Two speed control ranges, M (1~50 mm/s) and C (50~150 mm/s); Push-lock and push-lock/indicator models available; Elbow/universal and in-line types; Imperial and metric variations

Two speed control ranges, M (1~50 mm/s) and C (50~150 mm/s); Push-lock and push-lock/indicator models available; Elbow/universal and in-line types; Imperial and metric variations

Thermo-chiller

capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum

α PneuAlpha HARDWARE MANUAL

Table 4.1:Recommended Power Wiring 8 PneuAlpha Base Unit 7 Magnetic Switch Contact 6 Power Supply for AC loads 5 Circuit protection device limit to 1.0 Amps 4 Power On Pilot Indicator 3 Emergency Stop 2 Circuit Isolation Device 1 Power Supply: AC~:100-240V 50-60Hz DC: 24V Ref.

Drain Separator for Vacuum Series AMJ 1

ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 158 (160) 2.3 53 8 6.5 23 40 41 16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note

C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?

C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?