CC

**Valve opens when solenoid valve stops conducting electricity. voltage 110V, 220V AC/6, 12, 48, 100V DC 50Hz: 14VA 60Hz: 13VA Inrush AC Apparent power 50Hz: 9VA 60Hz: 8VA Holding DC 6.5W MK/MK2 Electrical entry Grommet (Standard), Conduit, DIN terminal RSQ/RSG RSH CE1 CE2 ML2B ML1C REA REC RHC MTS CC (mm) Model Oil port size (Rc(PT)) A B CA* CL* GB GL KA KB KL L QA M NB NL QB QL R T GA F

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Centering Unit

When r the center shaft lowers, t the bearing holder plate is pressed, and the table is locked.

Booster Regulator Series VBA1110 to 4200 1

) The IN air passes the check valve to pressure boosting chambers A and B.

Refrigerated Thermo-chiller

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

SY3000/5000/7000 Series Plug-in Type

Applicable Fittings: Series KQ2H, KQ2S Series KJH, KJS 16 SY3000V-OMM0002-B Valve Construction 17 No.SY3000V-OMM0002-B 18 No.SY3000V-OMM0002-B 19 No.SY3000V-OMM0002-B TROUBLESHOOTING Should any trouble be found during operation, trace the source of the trouble in the following order and take corrective action.

5 Port Solenoid Valve

SMC Corporation All Rights Reserved SX3000-OMM0002-B

Vinyl Chloride Air Operated Valve

Applicable tubing size Series Symbol q w e r Position Nil P2 P3 P4 Tubing outside Applicable series LVP5 Orifice dia. Body size Symbol Symbol diameter 22 mm 26 mm 32 mm 5 6 16A 20A 25A 16 mm 22 mm 5 6 LVP6 Symbol Pilot port thread (fitting) type A Symbol Nil 1 2 N Thread (fitting) type 6 mm One-touch fitting Rc1/8 M5 x 0.8 NPT1/8 PA B N.C. A PB Option B Applicable valve type N.C. N.O.

HRX-OM-S004

A specified earth leakage breaker is installed for option B [Earth leakage breaker], option B [Earth leakage breaker with handle] of each model.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for

CJ2

B H Part no. B H 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 9.2 8 M6 x 1.0 4 6 5.5 6.4 M3 x 0.5 2.4 SNJ-010B 10 NTJ-010A 12.7 11 M8 x 1.0 4 10 7 8.1 M4 x 0.7 3.2 NDd9 NDH10 R1 NX U1 Part no.

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

KJS23-M5 KJS04-M5 KJL23-M5 KJL04-M5 Symbol 1 2 4 5 3.2 (Straight) 4 (Straight) 3.2 (Elbow) 4 (Elbow) Solenoid valve combination (Refer to Table (1).)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) W 4 A 15.5 W 5.5 A 11.5 12 16 20 25 0.5 4.5 0 4.5 16 4 6 12 3.5 1 20 7.5 2.5 16 5.5 -1 21 9.5 0.5 17 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

LZ-OM004xx

F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

A 10 12 16 20 Motor option B 5 6 8 10 Stroke Actuator cable type/length Nil Without option 50 50 B With lock to to Robotic cable [m] 1200 1200 Nil None R8 8 * *For details, refer to the applicable stroke table below.

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

MXQ

Option Combinations Functional option Nil F R P FR FP Adjuster option Adjuster option Nil Without adjuster Extension end adjuster Retraction end adjuster Double end adjuster Extension end absorber Retraction end absorber Double absorber Extension end metal stopper Retraction end metal stopper Double metal stopper Nil (3) (3) (3) AS AT A BS BT B CS CT C ASBT ASCT BSAT BSCT CSAT CSBT AS AT