NCQ2/CQ2

T2 M W Joint Joint/Mounting Bracket (Type A/B)/Part No.

Air Slide Table

D B B E C A P F Single rubber stopper M M G D A A MXQA-A27 Model Adjuster part no.

Battery-less

C B M A W Model LES25 B side parallelism to A side 0.4 mm B side traveling parallelism to A side Refer to Graph 1.

Compact Cylinder

Type A mounting bracket YA-03 Joint YU-03 RS T2 V M W Joint Joint/Mounting Bracket (Type A/B)/Part No.

Air Cylinder

v v v v v Pivot bracket (T-bracket) v V Cylinder model: CDJ2KD16-45SZ-NW-M9BW-B Double clevis Mounting Brackets/Part No.

ISO Cylinder

Single acting, Spring extend V V Mounting bracket*1 Applicable mounting bracket Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N E V V V V V F V V V V Y V V V V Single acting, Spring return Single acting, Spring extend E V V V V V F V V V V *1 Refer to Mounting Brackets/Accessories on page 72 for details of mounting brackets

Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-Y59A, B /D-Y69A, B /D-Y7P(V) Direct Mounting Style . 2-color Indication Type . D-F79W/D-F7PW/D-J79W Rail Mounting Style. D-Y7NW(V)/D-Y7PW(V)/D-Y7BW(V) Direct Mounting Style ... D-F9NW(V)/D-F9PW(V)/D-F9BW(V) Direct Mounting Style . 2-color Indication Type with Diagnostic Output. D-F79F Rail Mounting Style.

Electric Actuator/Slider Type

Note 2) W V L B + Stroke M H thread depth C A + Stroke EH S Note 1) Range within which the rod can move.

Made to Order

D-H7BA D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C80 D-H7 D-H7W D-H7NF D-H7BA D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-C7 D-C80 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B64 D-B59W D-A9(V) Bore size (mm) Bore size (mm) B 24 (32) 24 (32) 25 (33) 27 (36) 32 (36) B 20 (28) 20 (28) 21 (29) 23 (32) 28 (40) A A 21.5 (29.5) B 20.5 (28.5) A B 15.5 (22.5) A B 17.5 (25.5) A B 19.5 (27.5

Rotary Actuator/Vane Type

m 2-wire typeD-T99(V)m 1.

Step Motor Controller

Connector C (14.2) Cable length (L) 1 3 5 8 A B C (16.6) (23.7) (6.5) Connector A (12.7) (5.6) 1 3 2 4 1.5 m 3 m 5 m 8 m 3 2 1 (13.5) 1 4 A 1 2 (18) B 10 m (6.5) (14.7) 15 m 15 16 (30.7) (11) L Connector B 20 m (10) Connector D Produced upon receipt of order Connector C terminal no. 1 2 3 Connector A terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector B terminal no.

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

T2 V U CU T1 CQS F E B CQM Joint and Mounting Bracket (Type A, Type B) Part No.

LVQ

T) V LVQ30, LVQ40 LVQ50, LVQ60 N M (Max. S) V C A B A B U D (Max.

Electric Actuator

D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model Auto Switch Internal Circuit 8 8 7 0.5 D-M9NW(V) 14 14 13 1 Lead wire length (m) 41 41 38 3 DC (+) Brown 68 68 63 5 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black How to Order D-M9 N W V L DC () Blue Series Lead wire length D-M9PW(V) Nil M L Z 0.5 m 1 m 3 m 5 m Wiring/Output type DC (+) Brown Electrical entry

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Signal Red Black Brown Blue 4 5 1 2 Lock (+) Lock () Sensor (+) Sensor () B-1 A-1 B-3 A-3 595 B LECPA Series Options [I/O cable] LEC C 1 L5 I/O cable length (L) I/O cable type L5 For LECPA 1 1.5 m 3 3 m 5 5 m Pin no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke + G mm) T Z LEF V EV J H thread depth C LEJ LEL U M M LEM D 4 x O1 thread depth R Y L B + Stroke A + Stroke LEY K Note 2) M EH M S 4 x O1 thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Note 1) Range within which the rod can move.

Electric Actuator

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 [Robotic cable, standard cable with lock and sensor for step motor (Servo/24 VDC)] LE-CP/Cable length: 1.5 m, 3 m, 5 m 1 3 5 LE CP 1 B Actuator side Driver side (8) Connector A (14.2) B1 (Terminal no.) Connector C (Terminal no.)

15

SANMOTION R R2 V V OMRON Corporation Sysmac G5 R88M-K V V Panasonic Corporation MINAS-A4 MSMD V V MINAS-A5 MSMD/MHMD V V FANUC CORPORATION is V V (1 only) V NIDEC SANKYO CORPORATION S-FLAG MA/MH/MM V V KEYENCE CORPORATION SV SV-M/SV-B V V FUJI ELECTRIC CO., LTD. ALPHA5 GYS/GYB V V FALDICGYS V V ORIENTAL MOTOR Co., Ltd.