CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Lead wire length symbols: 0.5 m Nil(Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are applicable auto switches other than the above, refer to page 538 for details. For detail about auto switches with pre-wired connector, refer to pages 1328 to 1329. Auto switches are shipped together but not assembled.

High Vacuum L Type Valve

Valve specifications Model XLF-16-2 XLF-25-2 XLF-40-2 XLF-50-2 XLF-63-2 XLF-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

Copper, fluorine and silicone-free + Low particle generation Bore size (mm) Auto switch Port type Nil Without auto switch Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol For applicable auto switches, refer to the Applicable Auto Switch. 21 22 Relief type Vacuum suction type CXSL CXSL Nil 25, 32 TN TF Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Auto switch mounting Bore

Air Cylinder Series MB

Bore size (mm) Part no. l Applicable cotter pin m Dd9 L d H B C 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03Note 1) 10 14 22 25 44 36 4 4.5 5 5 3 4 4 4 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 6 8 11 13 16 16 17 22 27 32 41 41 19.6 25.4 31.2

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

1 Stainless steel M4 x 0.7 x 8 Cross-recessed head cap screw Cross-recessed head cap screw Steel wire M4 x 0.7 x 8 M3 x 0.5 x 6 !0 !2 NBR 14284 O-ring 143021 !1 15-9-41 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

•

M 4.Types of air. 2.Ensure space for maintenance.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, 22 lb

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Model Av x 106 m2 C [dm3/(sbar)] N.C. 0.96 Cv 0.40 b 0.14 Cv converted 0.04 1 0.04 VDW10 M5 1.6 0.07 0.07 1.7 0.25 0.30 1.6 0.09 0.08 1.9 0.45 0.31 M5 1/8 (6A) VDW20 2.3 0.18 0.18 4.3 0.45 0.58 3.2 0.33 0.30 7.2 0.38 1.2 2 0.16 0.16 3.8 0.52 0.52 1/8 (6A) 1/4 (8A) VDW30 3 0.30 0.28 6.7 0.52 1.0 4 0.46 0.44 11 0.49 1.5 244

MLU

Lock Specifications 25 32 40 50 Size Locking action Unlocking pressure Locking pressure Locking direction Spring locking (exhaust locking) 0.2MPa or more 0.05MPa or less One direction (extension locking, retraction locking, each type) 0.7MPa Symbol Maximum operating pressure Extension locking Retraction locking 245 403 629 982 M5 x 0.8 Rc, NPT, 1/8 Unlocking port connection size W Holding

10

MB1 Bore size [mm] Thread size Pulling force Stroke [mm] 32 M2.5 x 0.45 x 25 L 4.9 N 2 40, 50, 63 M3 x 0.5 x 30 L 10 N 3 80, 100 M5 x 0.8 x 40 L 24.5 N 3 Before starting operation, supply air to side without locking mechanism as figure above, (or side without locking the piston rod for models with locking at both ends.) Otherwise, lock may not be released. (Refer to Release of lock.)

energy saving effect

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 300 x 4.186 x 103 x 12 900 = = 16744 [J/s] 16.7 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 16.7 [kW] x 1.2 = HECR 1 x 300 x 60 x 1.0 x 103 x 12 15 x 860 20 [kW] = HEC Thermo-chiller Q x t: Heat capacity [kJ] 16744 [W] = 16.7 [kW] Water bath 20C HEB Cooling

Digital Flow Switches

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

53

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

MB

Bore size (mm) Part no. l m L d Dd9 H B C D Applicable cotter pin CJ1 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 Note 1) When using cotter pin, flat washer is used together.

RB/RBL/RBQ

C J G5-S Material: Carbon steel Material: Polyurethane (mm) (mm) (mm) CV MM A B M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 B 3.5 4.5 5 6 6.6 C 22 27 32 41 41 h1 25.4 31.2 37 47.3 47.3 C 4 8 8.3 11.3 13.1 h M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 MM B 6 6 6 6 6 C 22 27 32 41 41 Part no. Part no. Part no.

RB/RBL/RBQ

x 1.0 19 M5 9 drill, 14 counterbore depth 8.6 16 12.5 34 54 M14 x 1.5 25 M8 11 drill, 17.5 counterbore depth 10.8 22 19 44 70 M20 x 1.5 38 M10 13.5 drill, 20 counterbore depth 13 34 25 52 80 M27 x 1.5 50 M12 10-18-16

10

RJ2725U Model With cap H L L H L H H L H L Collision speed range 0.5 Max. absorbed energy (J) Note) 1 3 10 30 70 6 x 0.75 O.D. thread size (mm) 8 x 1 10 x 1 14 x 1.5 20 x 1.5 27 x 1.5 4 Stroke (mm) 6 7 12 15 25 0.05 to 1 Collision speed (m/s) 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 1.5 0.05 to 1 80 Max. operating frequency (cycle/min) Note

Pressure Sensor for General Fluids

Model No. 01 02 Port size R1/8, M5 x 0.8 R1/4, M5 x 0.8 Piping port: C3604 + electroless nickel plated Pressure sensor: AI203 (aluminum oxide) O ring: FKM + Grease Materials of parts in contact with fluid Without lead wire and M12 connector 88 g 95 g Weight With lead wire and M12 connector 175 g 182 g Cable specifications Nominal cross section area AWG23 Conductor Outside diameter 0.72 mm

Air Catch Sensor Series ISA

Detection nozzle: 1.0 Operating piping: 6 x 4 tubing Supply pressure: 0.1 MPa Set distance: 100 m Detection nozzle: 1.0 Operating piping: 6 x 4 tubing (5m) Supply pressure: 0.2 MPa 2.5 4.0 Set value 50 m 300 m 100 m 200 m ZSE ISE 2.0 3.5 ZSP Response time (sec) 1.5 3.0 PS Response time (sec) 1.0 2.5 ISA Piping tubing length 0.5 PSE 2.0 10m 8m IS 50 150 0 1.5 100 200 250 300 350 5m ISG 3m

PF2A/PF2W

(500 VDC) between external terminal and case 4.9 m/s2 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs. each Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Weight Note 3) 410 g 470 g 650 g 1,100 g Port size (Rc, NPT, G) Note 1) The system