SMC Corporation of America
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IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S B R G BU W Y YR N S PU BR GD GR T Black Red Green Blue White Yellow Orange Natural Silver Purple Brown Dk.

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

With double locks: CBG1BN Bore size Stroke W (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 S + Stroke 80 146 220 ZZ + Stroke 100 146 220 With rod boot IJ e JH 8 l f h + l JW ZZ + l + Stroke (mm) Front lock (-R) ZZ Double locks (-W) Rear lock (-H) Bore size (mm) e f h IJ JH JW l ZZ ZZ 20 30 16 55 27 (14.5) (11.5) 138 137 (145) 149 25 30 17 62 32

U nderst and t hi s operat i on m anual w i l l be revi sed w i t hout not i f i cat i on. To get t he best perf orm ance f rom your purchase, be sure t o read t hi s m anual caref ul l y bef ore use. M I CRO M I ST SEPARATO R Seri es AM D W ARN I N G Chem i cal s Corrosi ve gas + At m osphere Cont ai ni ng organi c sol vent *N .

U nderst and t hi s operat i on m anual w i l l be revi sed w i t hout not i f i cat i on. To get t he best perf orm ance f rom your purchase, be sure t o read t hi s m anual caref ul l y bef ore use. W ARN I N G Separat e and rem ove f orei gn m at eri al and oi l m i st cont ai ned i n com pressed ai r.

13 5.5 19.5 8 M10 X 1.25 45 15 34.5 32 M26 X 1.5 26 22 41 8 10 14 46.5 24 16 7 21 11 M14 X 1.5 50 21.5 42.5 40 M32 X 2 32 Dimensions by stroke Boss-cut style (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ S ZZ S ZZ ZZ ZZ ZZ ZZ ZZ Bore Bore 87 141 112 166 137 191 20 20 128 153 178

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

RS W T1 T2 V C UA Material: Chrome molybdenum steel (nickel plated) 9 50 80 18 6.5 10 YB-03 32, 40 Part no.

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 0.5 s 100 100 1 s 1 s 150 150 2 s 2 s 200 200 5 s 5 s 250 250 300 300 2) With high speed de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height from ionizer to workpiece (Charged object location) [

Symbol Type Nil Rc N F NPT Port size G 100 30 50 60 75 Port size Symbol Nil H L L S L S L S Nil H L 02 03 04 $ $ $ $ $ $ $ $ $ $ $ $ 1/4 3/8 1/2 $ $ $ $ $ $ $ $ $ $ $ $ Component equipment 100 30 50 60 75 Component equipment Nil H L L S L S L S Nil H L Mist separator AFM40 AFD40 Micro mist separator Micro mist separator regulator AWD40 Replacement Parts (Element for mist separator, micro

(g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated simultaneously, supply pressure to port P on both sides and exhaust from port R on both sides, using "stations B (SUP/EXH block both sides)".

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

34 LVQ D LQ LVN U 25 R C 44 TI/ TIL C R G1/2 PA E E G1/2 PAX B B 2-P Port size A A D 2-P Port size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104

3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.

ZK2-OM00201 (7) Connector assembly ZK2 LV W K A Valve type: J Valve type: K, R Applicable valve type Lead wire length Nil 300 mm Valve type K, R 6 600 mm W (With supply valve and release valve) 10 1000 mm 20 2000 mm S Valve type J (Supply valve only) 30 3000 mm (8) One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com