VXA21/22

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 4 The VX series will be revised shortly.

VXZ

Normally open VXZ 2232 02 1 G N.O.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214

Plug-in Unit

S kit can be used by connecting to gateway unit.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

HRX-OM-M091

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Plug-in/Plug Lead: Single Unit

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) JEMANET (JPCN-1) Mitsubishi Electric Corp.: CC-LINK System Rockwell Automation: Allen Bradley Remote I/O (RIO) System NKE Corp.: Uni-wire H System 02 2 stations (2) ... ... 12 12 stations Note 1) When two or more symbols are specified, indicate them alphabetically. Example) -CD1K.

CATALOG VC10

Body Brass Body S. S.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

KK/KK13

Couplers How to Order KK 13 S 02 M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02 Socket Plug Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 G1/4 Hose I.D. 1/4" 5/16" 3/8" 1/2" Construction No. 1 Description Material Plug Description

TABLE OF CONTENTS

Body Brass Body S. S.

CE2

C J G5-S Auto Switch Mounting Bracket Part No.

CE2

C J G5-S Auto Switch Mounting Bracket Part No.

VQ5000

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) JEMANET (JPCN-1) Mitsubishi Electric Corp.: CC-LINK System Rockwell Automation: Allen Bradley Remote I/O (RIO) System NKE Corp.: Uni-wire H System 02 2 stations (2) ... ... 12 12 stations Note 1) When two or more symbols are specified, indicate them alphabetically. Example) -CD1K.

HRX-OM-I051

(Only for HRZ010-W*S) 0, 15 to 40 LPM 0, 4 to 10.6 GPM 6 LOW FLOW 0, 8 to 40 LPM 0, 2.1 to 10.6 GPM (Only for HRZ010-W*S) 7 FLOW UNIT LPM, GPM Allows the selection of the unit of flow rate. 8 PRESS UNIT MPa, PSI Allows the selection of the unit of pressure. 9 SLAVE ADRS. 1 to 16CH Allows the selection of the slave address for serial RS-485 communication.

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Contents Action 12 12 CQSB12-S-PS CQSB12-T-PS Kits include items !2, !3 and !4 from the table above. 16 16 CQSB16-S-PS CQSB16-T-PS Kits include item !3 Single acting Spring return Single acting Spring extend 20 20 CQSB20-S-PS CQSB20-T-PS from the table above. 25 25 CQSB25-S-PS CQSB25-T-PS Seal kits consist of item !

S Couplers Series KK/KK13

Couplers Series KK13 How to Order KK 13 S 02 M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02 Socket Plug Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 G1/4 Hose I.D. 1/4" 5/16" 3/8" 1/2" Construction No. 1 Description Material