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2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Note 3) For calculation on the longitudinal dimension of the intermediate strokes, refer to page 7-6-3.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

15

3 mm or more.

100

How to Order Lead Wire Assembly with Connector ZS L 38 3 q Number of cores t Manual override 3 3 cores, 1 output 4 4 cores, 2 outputs Nil Non-locking push type D Push-turn locking slotted type q y CE-compliant c How to Order Suction Cover Assembly Nil (For AC) Q CE-compliant (For DC) ZL112A FC1 A Suction cover assembly (With filter element) q How to Order Connector and Socket for Supply

HRS100/150

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Circulating fluid flow rate: Rated flow, t Power supply: 200 VAC Note 4) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow

energy saving effect

phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability

Stopper Cylinder

5 y q !4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !8 u t @8 #3 @9 $3 $5 $4 #0 $1 $2 $6 Auto switch @6 @4 #1 @3 @5 #6 #5 #7 #8 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 #9 $0 Component Parts Component Parts No. Description Material Note No.

AZ1000

Porting Configuration Ports Seat material Ports 2 ports 3 ports 4 ports Code r Code Material PCTFE (Standard) Vespel 2PW 3PW 4PW No code VS w q w q Pressure gauge unit 3) 2PW 3PW 2) Refer to gauge guide (P.94) for gauge specifications.

ZP

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

Thermo-chiller

Q: Heat generation amount I: Current Users equipment q Derive the heat generation amount from the power consumption.

MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

IO-Link port No. 0 1 1 2 2 3 3 4 Precautions for handling Be sure to fit a seal cap on any unused connectors. Proper use of the seal cap enables the enclosure to achieve IP67 specification. -41No.EX-OMX1011 LED display The LED displays the status of Pin No.4 (C/Q) and Pin No.2 (I/Q or P24) of each IO-Link port of the SI unit. The figures below show the status of each port.

MGP

6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

3 !4 r t y u i !5 !6 No.

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0 @6 q i r 2a 3a @0 @3 !5 @7 !7 o u y @5 t @8 !2 !3 !8 @2 !9 With switch rail Component Parts No. Description Note Material No.