Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size: PFA, M6, Option: -, Lead Wire Length: -

Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size: PFA, M6, Option: -, Lead Wire Length: -

Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size: w/o Sub-plate, Option: Manual Override, Lead Wire Length: -

Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size: PFA, M6, Option: -, Lead Wire Length: -

Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size: PFA, M6, Option: -, Lead Wire Length: -

Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm

Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: -

Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: -

Symbol: Body Ported, 2 Port, N.C., M5 Thread, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: -

HRX-OM-R026

For details, refer to the [5.19 Communication function]. *2 When using with optional accessories, depending on the accessory, the allowable current of 24 VDC devices will be reduced. Refer to the operation manual of the optional accessories for details.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

Slit Valve

Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM, Kalrez 4079 (Option) Seal material Bellows AM350 Gate A6063 Main material of vacuum part Body A5052 Bonnet A5052 Others Stainless steel 304 Exhaust direction Free Mounting direction Vertical Port size M5

Actuation: Normally Closed, Piping: Base Mounted, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: L Plug Connector, w/Lead Wire Length 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Port Size: M5 Port w/Sub-plate, Brackets: -

Actuation: Normally Closed, Piping: Base Mounted, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: L Plug Connector, w/Lead Wire Length 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M5 Port w/Sub-plate, Brackets: -

Actuation: Normally Closed, Piping: Base Mounted, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: L Plug Connector, w/o Connector, Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Lever Type, Port Size: M5 Port w/Sub-plate, Brackets: -

Actuation: Normally Open, Piping: Base Mounted, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: M8 connector, w/o Connector Cable, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Non-polar Type, Manual Override: Non-locking Push Type, Port Size: M5 Port w/Sub-plate, Brackets: -

Actuation: Normally Closed, Piping: Body Ported, Coil Specification: Standard, Voltage: 12 VDC, Electrical Entry: L Plug Connector, w/Lead Wire Length 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Port Size: M5 Port w/Sub-plate

Actuation: Normally Closed, Piping: Body Ported, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/o Connector, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M5 Port w/Sub-plate

Actuation: Normally Closed, Piping: Body Ported, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: M8 connector, w/o Connector Cable, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M5 Port w/Sub-plate

Actuation: Normally Closed, Piping: Body Ported, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/o Connector, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Port Size: M5 Port w/Sub-plate