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C H N I C A L SPECIFICATIONS Fluid Air Operating Pressure 0 ~ 9.9 Bar / 0 ~ 144PSI Ambient and Fluid Temperature 5 ~ 60C / 41 ~ 140F Effective Orifice (Cv Ffactor) 6mm2(0.33) Recommended Lubricant Turbine Oil #1 (ISO VG32) Port Size 18 H O W T O O R D E R (N)VM800 V A LV E APPLICATIONS (N)VM830 01 3 3 Ports N O O F P O R T S T H R E A D A C T U AT O R PT N NPT * Remove (N) when ordering 00

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Compact and lightweight design The square covers are made of an aluminum die-casting and provide a lower cost, lighterweight product. 6-15-2 6-15-3 3 NFPA Interchangeable Cylinder: Standard Type Double Acting, Single Rod (Medium Duty) Series NCA1 Inch size: 1.5", 2", 2.5", 3.25", 4" How to Order NC D A1 B 150 04 00 A54 XB5 Option Built-in magnet Oversized rod High temperature Low temperature

SMC Corporation of America 10100 SMC Blvd., Noblesville, IN 46060 www.smcusa.com SMC Pneumatics (Canada) Ltd. www.smcpneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquiries: www.smcworld.com QV-00M-00 2012 SMC Corporation of America, All Rights Reserved.

.: 0.96 mm High visibility A large LED display for an easily visible switch Wetted parts material Standards Pressured sensor part: Silicon, Body part: PBT, O-ring: HNBR CE (Option), RoHS Note) For wiring, refer to the Operation Manual on our website, http://www.smcworld.com Series PS1000/1100/1200 CAT.NAS100-23B RoHS How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Output specifications

Description Model ALDU900 ALD900 ALDU600 ALD600 126044P 113449 Note 1) 113543 Note 2) Bracket 126130P 126044P 126130P Panel 12661P 12651-1P IS430-1 IS420-1 IS430-1 IS420-1 Float switch S1 ALD600 IS430-2 IS420-2 IS430-2 IS420-2 S2 1 4 1 2 Note 1) Bracket for filter mounting: For Rc 1 ,1 Note 2) Bracket for filter mounting: For Rc 2 Thread machining on filter body is needed. } How to Order ALD 20 9 00

Positive pressure ISE1 ZSE1 Vacuum Wiring specifications Piping specifications Grommet type (Lead wire: 0.6 m) Nil 00 For mounting on ZM ejector Single mounting R 1/8 Note 2) Grommet type (Lead wire: 3 m) 01 L Single mounting NPTF 1/8 Note 2) T1 Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) Note 2) Single mounting style: M5 x 0.8 (female) threaded.

-X 685 CE2 Series Cylinder Specifications Bore size (mm) 40 50 63 80 100 Fluid Air (Non-lube) Proof pressure Drive 1.5 MPa Brake 0.75 MPa Maximum operating pressure Drive 1 MPa Brake 0.5 MPa Minimum operating pressure Drive 0.1 MPa Brake 0.3 MPa Piston speed 50 to 500 mm/s* Ambient temperature 00 to 60C (No freezing) Brake system Spring and pneumatic lock type Sensor cord length 7-500 mm

mm2/s Total capacity: 3000 Effective capacity: 2500 5 to 50C 100 VAC 50/60Hz, 200 VAC 50/60Hz, 24 VDC ALD ALB Oil tank capacity (cm3) Ambient and fluid temperature Solenoid valve voltage LMU LMU SUP Rc 1/4 ALIP AIR : T0604 (6 tube) applicable OIL : T0425 (4 tube) applicable AIR BLOW : T0806 (8 tube) applicable Port size OUT 3 x Rc 1/4 AEP HEP Weight (kgf) 8.4 7.9 How to Order LMU100 LMU 00

How to Order KJ H M3 02 Model Male connector Straight union Different diameter straight Port size H M3 M5 00 23 04 M3 M5 Same diameter tubing 3.2 4 S L W Hexagon socket head male connector Male elbow Extended male elbow Male branch tee Union tee Male run tee Union "Y" Different diameter union "Y" Plug-in reducer Bulkhead union Note 1) Note 1) Note 1) Different diameter tubing O.D.

range Ambient and fluid temperature Contacts Error of scale Hysteresis Repeatability Enclosure Mass Air/Inert gas 1.0 MPa 0.8 MPa 0.1 to 0.7 MPa 5 to 60C (No freezing) 1ab 0.1 MPa 0.05 MPa or less 0.05 MPa Equivalent to IP40 0.15 kg Frequency: 1 cycle/sec Service life: 10 million cycles With indicator light Micro Switch Ratings 0 1 0 1 IS3100 (Gasket piping) IS3000-02 (Rc 1/4 thread) IS3 00

RoHS How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Nil Q None CE-compliant Output specifications 10 11 12 For positive pressure For vacuum and residual pressure For vacuum The PS1200 series is CEcompliant (with Q) only.

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 1 8 NPT N01 1 8 G F01 Number of pilot ports Single pilot 2 1 Double pilot Number of ports 5 port 5 Dimensions Side ported Bottom ported Stroke 2 mm Stroke 2 mm Indicator light Indicator light Manual override (Button diameter 3.5) Manual override

KJS04-M5 4 (Straight) Single unit KJS06-M5 6 (Straight) KJL04-M5 4 (Elbow) Note 9) For filter only (Without vacuum pressure switch) When neither V port fitting nor P port fitting are needed, enter nothing or 00 in the dotted line above How to Order. 2

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

5/2 AIR OP DBL VALVE *LQA, OTHERS, CAD PROGRAMS, NON DISCOUNTED, 00, CAD SET, .04411 lb

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

Piping adapter assembly - old style see E*00 - New Style , Easy maintenance , Detach equipment without removing piping , Assembles to FRL's by simply tightening screws , Available with a "L" and "T" type bracket, ADAPTER, MODULAR PIPING, AIRLINE EQUIPMENT, AF FILTER, 22, AF NO SIZE RATKIT/ACCESSORY, .22000 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R