Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS

6 18 15 17.5 26 5 5 M6 x 1 M5 x 0.8 M3 x 0.5 14 26 6 2.8 25 10 7 15 12 8 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 28 14 10 20 14 12 25 25 8 40 6 14.5 2.5 M10 x 1.5 M4 x 0.7 20.4 39 Rc1/8 34 12 12 15 25 11 RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD Model 2 5.7 7 6 12.5 4 8.5 18.6

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Type Dimensions MHW2-25D Flat finger type (Standard) 24 2 x M6 x 1 thread depth 10 (Mounting thread) 20 4 x M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 69 51 40 27 2 x M6 x 1 thread depth 12 (Mounting thread) 34 45 24 27 30 8 2 20 +0.2 +0.1 17 MHZ 26H9 +0.052 depth 3 0 30 40 21 MHF 4 x M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread

SYA3000/5000/7000

) Manual override (Non-locking) 1.3 (Ventilation hole) M5 x 0.8 (P , EA, EB port) 2 x 1.5 die-cast hole (For manifold gasket positioning) SYA3120-M5 M5 x 0.8 (A, B port) 1732 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported 2 position double SYA3220(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/

3 Port Air Operated Valve

VPA300/500/700 Series VPA700 Series/Base Mounted/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-103 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-13/8, 1/2 2(A) port 40 16 64 3/8, 1/2

Table of Contents

40 50 50 55 55 65 85 , Misc.

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

Compact Cylinder

50 63 20 25 32 40 50 63 7 16 8 22 36 22 4 16 22 6.6 2.8 8 38 55 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50

Integrated Controller

Motor Maintain a space of 40 mm or more. e-Actuator rod type built-in magnet portion (Piston) 40 40 40 Maintain a space of 40 mm or more. 40 40 e-Actuator slider type built-in magnet portion (Table unit) An air cylinder with an auto switch cannot be installed in the shaded area. 63 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Solid State Auto Switches

Applicable bore size (mm) 40 50 63 80 100 Z C HW H H T T Auto switch model D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 6.5 6.5 7.5 9.5 9.5 44 52 64 78 92 69 77 91 107 121 57 58 60.5 64 67 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 M5 x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 1590 2-Color Indication Type Solid State Auto Switch Direct Mounting

Compact Cylinder

Standard (Through-hole): JCQ, JCDQ 20 Both ends tapped: JCQA, JCDQA Both Ends Tapped [mm] O1 thread R R Bore size O1 R 20 M4 x 0.7 7 25 M4 x 0.7 7 32 M5 x 0.8 8 40 M5 x 0.8 8 Minimum lead wire bending radius 10 Auto switch F Q H thread effective depth C 4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch

240

40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Horizontal/Bottom 160 160 160 160 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 120 120 120 120 Me m Y 80 80 80 80 40 40 40 40 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1

Compact Type

25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper Auto Switch Mounting Position for Stroke End Detection CXSJ6

Compact Type Dual-Rod Cylinder Series CXSJ

25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper Auto Switch Mounting Position for Stroke End Detection CXSJ6

Low Profile Slide Table Series MXF

F A A MXH Lr MXF16 MXU Lr = 40 mm 0.07 0.07 0.20 MXS Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 0.06 MXF16-75 MXQ 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MXF 0.12 0.04 0.04 MXF16-50 MXW MXF16-50 0.03 0.03 0.08 MXF16-30 0.02 0.02 MXJ MXF16-30 0.04 0.01 0.01 MXP 0 0 20 40 60 80 100 20 40 60 80 100 120 60 0 40 80 100 20 MXY Load

MXF

10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide

MY2

0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G

Electric Actuators

40 40 40 0 0 0 0 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 Work load [lb] Work load [lb] Work load [lb] Work load [lb] 0 50 100 150 200 250 300 200 0 50 100 150 200 250 300 200 Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] 160 160 L2 120 120 80 80 40 40 Horizontal mounting Wall mounting 0 0 0 0.44