S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

Power Valve: Economy Valve Series VEX5

Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

LEC-OM036xx

CN1: Controller IF communication connector (CONT)28 8. 1 Connection.28 8. 2 Wiring diagram.30 9. CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

Series VS

-8 VSS8-10 Description Description VSR8-8 VSR8-10 VSR8-10 VSR8-6 VSR8-6 VSR8-8 VSR8-10 VSR8-8 VSR8-6 1.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Lead wire length: 1000 mm ZM-K1LO . 1 pc. VJ10-36-1A-10 . 2 pcs.

Series 10-, 21- AF-A Air Filter

Note 8) : For pipe thread type: NPT only 1069 A Air Filter 1021-AF-A Standard Specifications Model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 1 10-/21-AF60-A 10-/21-AF40-06-A 10-/21-AF50-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa 5 to 60C (No freezing) Ambient & fluid temperature 5 m Nominal filtration rating 1600

RLQ

speed mm/s Allowable load weight (Graph (2)) Horizontal (With and without switch) 10 Load weight m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion Needle Adjustment Warning 1.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

IO-Link/ELECTRO-PNEUMATIC REGULATOR

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value Bit 3 2 1 0 Setting 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 * 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 16 - Parameter index 0x43 Parameter name Sensitivity

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

kPa 10 to 105 kPa 0.001 0.1 0.001 0.001 0.01 PSE564 PSE574 0 to 500 kPa 50 to 525 kPa 0.001 1 0.01 0.01 0.1 PSE530 PSE540 PSE560 PSE570 0 to 1 MPa 0.105 to 1.05 MPa 0.001 1 0.01 0.01 0.1 PSE575 0 to 2 MPa 0.105 to 2.1 MPa 0.001 1 0.01 0.01 0.2 PSE576 0 to 5 MPa 0.25 to 5.25 MPa 0.01 0.1 0.1 1 PSE577 0 to 10 MPa 0.5 to 10.5 MPa 0.01 0.1 0.1 1 0 to 1.6 MPa 0.105 to 1.68 MPa 0.001 1 0.01

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking 100 100 63 63 50 50 40 Load mass kg Load mass kg 40 10 10 32 32 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 1 1 100 500 100 500 Maximum speed mm/s Maximum speed mm/s Allowable load mass (Graph (2)) Horizontal (With and without switch) 10 Load mass m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Ionizer IZN10 Series

NPN output PNP output Nil Port size P Power supply cable 6 : Metric size 06 Nil 6.35 (1/4") : Inch size With power supply cable (3 m) 07 6 : Metric size (Elbow) With power supply cable (10 m) Z 16 6.35 (1/4") : Inch size (Elbow) Without power supply cable N 17 Cautions when using the IZN10-11(female threads for piping) Connect the various Made-to-Order nozzles or fittings & tubing to the

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, AS 1/4INCH (MISC./OTHER), AIRLINE EQUIPMENT, AS FLOW CONTROL, DX, AS 1/4INCH (MISC./OTHER), 0.11693 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, AS 1/4INCH STANDARD (PT), AIRLINE EQUIPMENT, AS FLOW CONTROL, DB, AS 1/4INCH STANDARD (PT), 0.18005 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, AS 1/4INCH STANDARD (PT), AIRLINE EQUIPMENT, AS FLOW CONTROL, DB, AS 1/4INCH STANDARD (PT), 0.16534 lb

Clean Air Module

With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650 to 500 L/min With 10 One-touch fitting LVB3-7-2 With One-touch fitting GD Rc 1/4 LVB3-7-3 Threaded type LVB4-7 NPT 1/4 LVB3-7-4 Filter body only With 10 One-touch fitting, with differential pressure indicator With One-touch fitting Clean air filter assembly 6 LVB3-7-2-1 Rc 1/4, with differential pressure indicator LVB3-7-3-1