assembled) 1 Operating temperature range -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) 2 Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%RH (No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and FE Insulation resistance 500 VDC, 10 M min. between external terminals and FE Pollution degree For use in Pollution
) 1 Operating temperature range -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) 2 Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.
PSE3 Applicable pressure sensor For compound For vacuum For low pressure For positive For low differential Rated pressure range -100 to 100 kPa 0 to -101 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa 0 to 2 kPa Set pressure range 1 -101 to 101 kPa 10 to -101 kPa -10 to 100 kPa -0.1 to 1 MPa -50 to 500 kPa -0.2 to 2 kPa Set pressure resolution 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa
44 63 43 5.5 26 10 4.2 VHS5510 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 4.2 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS2510 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS3510 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS4510 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS4510-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS5510
Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000
50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 No.1(IN0ON) / DRIVEON No.1 DRIVE No.OUT05OFF IN0 INPOFF PLC BUSYON IN1 DRIVEOFF OUT0 No.1 OUT1 INP INPON BUSY No.1 ON OUT0ON BUSYOFF No.1 No.1 No.2(IN0OFF IN1ON) DRIVEON No.2 0mm 100mm No.OUT05OFF INPOFF
) 1 Operating temperature range -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) 2 Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.
10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 20 40 60 80 100 0 0 0
-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Air 1.5 MPa Fluid Proof pressure Note 4) 0.1 to 0.6 MPa Operating pressure
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
Body BC6 Operating lever SPCC q w e r t 0.02 Rod C3604B Adjusting gear POM Gear POM 10 20 30 40 50 60 70 Flow rate (l/min) 16-12-2 Diaphragm Style Flow Switch Series IFW5 Dimensions IFW50--00 to 04 (Without terminal box) ZSE ISE PSE Z I SE3 PS With neon light Lead wire length 500 Z I SE1 2 ZSP ISA2 IS ZSM PF2 IF 2-3/8, 1/2, 3/4 Data IFW50--10 to 24 (With terminal box) With neon light 2-3
to the right. 5 5 0.2 MPa 0.2 MPa 0 10 20 30 40 50 0 10 20 30 40 50 F1 Gripping point L (mm) Gripping point L (mm) F1 F1 532 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Construction q !
Max. load current or load current range (mA) D-A53 None PLC 5 to 50 24VDC 5 to 50 24VDC 5 to 25 100VAC Relay, PLC D-A54 5 to 12.5 200VAC None D-A56 20 IC circuit 4 to 8VDC 50 24VAC/DC or less None D-A64 25 100VAC Relay, PLC 12.5 200VAC None 30 Max. 24VDC None IC circuit, PLC D-A67 (2 color indication) 5 to 40 Relay, PLC 24VDC D-A59W None PLC 5 to 50 D-A33 24VDC 5 to 50 24VDC D-A34
one-touch fitting for5/32 N7:With one-touch fitting for1/4 N9:With one-touch fitting for5/16 SX3 5000-50-5AFor 45 G PC Wiring System compatible For 45 (Terminal block) SX3 5000-50-7ADIN Rail Manifold Exploded View How to Increase Manifold Bases Caution Station expansion is possible at any position.
No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules
/60/Hz) DC VO301-00T-X302 Conduit terminal 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15 to 10% of the rated voltage Class B or equivalent (130C) 70C or less (When rated voltage is applied.) 12 VA (50 Hz), 10.5 AV (60 Hz) 7.5 VA (50 Hz), 6 VA (60 Hz) 4.8 W Non-locking push type LVA Allowable voltage fluctuation Coil insulation type Temperature rise LVH LVD Inrush Holding
(between FE and all accessible terminals) Insulation resistance 10 M ohm or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z (complies
Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30
-5 Gasket DXT192-10-5 (Use caution to the orientation.)
44 51 Approx. 90 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) G 2 OUT 30 OUT(2) SUP(1) OUT 10 43 35 EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5