HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

Compact Electric Actuator Series LG1

thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Applicable filter model Set description Spare element O-ring for cover I-68S-A I-62S-A I-63S-A Element size (mm) 6 x 4 x L25 12 x 8 x L20 16 x 12 x L25 ZFC05 ZFC10 ZFC20 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. Note) Spare elements and O-rings for the cover (Applicable filter: ZFC10, 20) are sold in sets of 10 pieces each. *Do not wipe with alcohol, etc.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

IDX-OM-W093

)2 60Hz 6.1 8.6 12.8 15.5 m3/min 50Hz 5.6 8.0 11.6 14.3 3 60Hz 6.5 9.1 13.6 16.4 10 0.7 MPa 35 40 32 /AC200V (50Hz) /AC200/220V (60Hz) () 10%4 7-2 200V 770/910 1260/1590 1770/2170 2270/2960 5) 50/60Hz W 200V 790/970 1150/1380 1700/2160 2330/2980 200V 4.2/4.6 6.7/7.9 9.7/10.9 11.8/14.8 5) 50/60Hz A 200V 3.0/3.2 4.3/4.4 6.5/6.8 8.9/9.1 (30mA) 6) A 200V 10 15 20 30 200V 15 20 10 R410AHFC

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

MHx-OMU0057

2. 3. 8 - 3. 4. 10 2 16 2 1 <> : AS1211F-M3 AS1201F-M5 AS1000 AS1002F 2-4. 1. 2. 3. 4. 9 - 1.( ) 2. 5 3. 4. oC 5 2-5. 1.

IDX-OM-W020

S 10 S 10-1 10-2 IDFB3E PE 10-1 IDFB Series 10 1 IDX-OM-W020 10 S IDFB4E 11E PE IDFB15 PE 10-2 IDFB Series 10 2 IDX-OM-W020 11 T 11 T 11-1 IEC 11-2 AC115V,5A DC24V,5A (20V,5mA(AC/DC)) 11-3 ON ON/OFF 3 () 5 /1 () 11-1 IDFB Series 11 1 IDX-OM-W020 11 T 11-4 IDFB4E 11E PE 1 2 3 : 0.25inch (6.5mm) : 0.002inch 2 (1.25mm 2) 0.003inch 2 (2mm 2) : 0.0008inch 2 (0.5 mm

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Proper tightening torque (Nm) (cylinder body) 10 16 20, 25 32 Hexagon socket head cap screw size (mm) Bore sizes (mm) 16 20 25 32 Piston seal: 1 pc. Rod seal: 1 pc. Gasket: 1 pc. CUX16-PS CUX20-PS M3 0.54 10% CUX25-PS M4 1.23 10% Grease pack (10g): 1 pc. CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2.

VCA

Valve type Thread type (for single unit only) Rc G NPT NPTF Nil F N T OUT(2) 1 IN(1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Orifice size Orifice size (mm) 3 4 5 7 10 Class 3 Class 2 Class 4 Symbol 3 4 5 7 10 Please consult

Rotary Table

16.9 20 10 2 190 22.8 50 10 18.8 20 10 3 190 24.4 47 10 20.4 15 10 7 190 28.7 31 10 24.7 15 10 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

Air Cylinder CLA Series Fine Lock Model

14.224 Vof ume alm 14.7 mm3 6.'10 x 10-5 in3 cm3 (cc) 0.0610 in3 Energy m3 35.320 fts N. m 0.7375 L 0.0353 ft3 J 0.7375 L 0.2642 gal (U.S.) MJ 0.2774 Weight Power g 0.0353 oz W 0.7376 kg 2.2046 lb kW 1.341 1.3559 N. m 0.1383 kg. m t t . l b tt. lb psi psi psi psi psi psi psi mm3 cm3 (cc) Area in2 645.16 in'?

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14.224 Vof ume alm 14.7 mm3 6.'10 x 10-5 in3 cm3 (cc) 0.0610 in3 Energy m3 35.320 fts N. m 0.7375 L 0.0353 ft3 J 0.7375 L 0.2642 gal (U.S.) MJ 0.2774 Weight Power g 0.0353 oz W 0.7376 kg 2.2046 lb kW 1.341 1.3559 N. m 0.1383 kg. m t t . l b tt. lb psi psi psi psi psi psi psi mm3 cm3 (cc) Area in2 645.16 in'?

IDX-OM-Y002

Option R . 10-1 10.1 Safety instructions for use . 10-1 10.2 Specifications. 10-1 10.3 Connection of power supply . 10-2 10.4 Handling Precautions of the Earth Leakage Breaker . 10-2 10.5 Electrical circuit diagram . 10-2 Chapter 11 Inspection record . 11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-Y002 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before