SMC Corporation of America
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Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), VNA/B/C/D, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 2.64554

._3d_items_collection = {}; } SMC SX3000-50-3A-C4 mfld block assy, SS5Y3 MANIFOLD SY3000*** $18.66 Add to Quote Add To Cart Add to Cart SMC SX3000-51-2A supply/exhaust block

._3d_items_collection = {}; } SMC SX3000-50-3A-N3 mfld block 45, d-sub, SS5Y3 MANIFOLD SY3000*** $18.66 Add to Quote Add To Cart Add to Cart SMC SX3000-51-16A sup/exh block,

Applicable load Type 2-wire 3-wire Solid state auto switch Auto switch model D-M9B(V) D-M9N(V) Load voltage 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 30 mA 50 mA or less Load current range Indicator light Yes Yes 24 VDC relay, PLC PLC: Programmable Logic Controller Refer to page 946 for the applicable auto switch list.

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Tightening of M5 Thread Use of Tube with Hose Nipple Caution Caution 1. Tighten by hand, and give it an additional rotation with a wrench. Please check the number of tightening revolutions using the table below.

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101-M5 Conditions/Upstream pressure: 0.5MPa SRP1-M5 Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50

HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101-M5 Conditions/Upstream pressure: 0.5MPa SRP1-M5 Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50

Pilot pressure range Ambient and fluid temperature (C) 0 to 60 (No freezing) Lubrication Required (Turbine oil, Class 1 lSO VG32 equivalent) VPA3165-06 VPA3145-03 Free Mounting orientation Impact resistance/Vibration resistance (m/s2) Note) 150/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, HA, VNA/B/C/D

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, LA, VNA/B/C/D

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D

type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7 25.4 1/4 KKH4S-03MS R3/8 53.7 50

Style Standard stroke (inch) Standard stroke (inch) Page Page Standard type Standard type Single rod 1 012 (1/8"), 062 (5/8"), 125 (1-1/4"), 250 (2-1/2"), 050 (1/2"), 100 (1"), 200 (2"), 400 (4") 037 (3/8"), 087 (7/8"), 175 (1-3/4"), 350 (3-1/2"), 025 (1/4"), 075 (3/4"), 150 (1-1/2"), 300 (3"), 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") Double acting Double rod 13

Characteristic Within 1% for each 7.5 osi Flow Capacitv 12.5 SCFM @ 70 psi and 9.0 SCFM @ 50 psi Port Sizes qauqe port 1/8" NPT supplv/output ports 1/4" NPT Weiqht 4.9 lbs. : .

0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Time sec Test circuit/Conditions P1 P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250 200 150 10 100 50

HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101-M5 Conditions/Upstream pressure: 0.5MPa SRP1-M5 Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Vacuum Pad, with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 58 lb

Hard disk space 50 MB or more Communication interface USB port (USB1.1 or USB 2.0) Note 1: If Microsoft.NET Framework is not installed during the installation, install Microsoft.NET Framework. 2.3 Applicable controller This setting software is suitable for use with the JXC3 series 4-Axis Step Motor Controller. 5 No.SFOD-OMT0012-A 3. Start-up 3.1 Preparation Prepare a USB cable.