New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542 Compact and light The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.
E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.
External pilot type is not available. 1 SYJ3 2 5 M M3 Body ported SYJ3 4 5 M 1 Base mounted Port size 3 port Nil: Without sub-plate M5: M5 port With sub-plate Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of W type.
Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.
Right angle type cable connector 3 m 52 10 ARJ (33) Straight type cable connector 3 m AR425 to 935 52 12.5 ARX AMR Setting part ARM 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 ARP 111 11 Digital pressure display IR-A M5 x 0.8 Solenoid valve EXH Breathing IR M4 x 0.7 depth 8 F.G.
3/h 273 m 3/h 390 m 3/h 660 m 3/h m 3/min (ANR) 1 7 oC 231 m 3/h 347 m 3/h 432 m 3/h 720 m 3/h 10 oC 254 m 3/h 382 m 3/h 510 m 3/h 822 m 3/h 0.7MPa 35 oC 25 oC 230V 50Hz 550 oC 0.15MPa 1.0MPa 24085% AC230V10 50Hz (4) (2) 4.3A 6.1A 7.9A (2) 760W 1390W 1700W (3) 10A 20A R407C(HFC) 42010g 73010g 55010g 67010g R1 R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?
(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?